{"id":"W2344034573","doi":"10.1557/proc-715-a19.1","title":"Amorphous Silicon Films and Superlattices Grown by Molecular Beam Epitaxy: An Optical Analysis","year":2002,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Regina; National Research Council Canada; Institute for Microstructural Sciences","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Materials science; Silicon; Amorphous solid; Superlattice; Amorphous silicon; Molecular beam epitaxy; Nanocrystalline silicon; Impurity; Substrate (aquarium); Raman spectroscopy; Optoelectronics; Crystalline silicon; Epitaxy; Nanotechnology; Crystallography; Optics; Chemistry; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001075149,0.0001872453,0.0001304515,0.0005463082,0.0004187863,0.0004061485,0.0003279546,0.0002527334,0.001810649],"category_scores_gemma":[0.0001872092,0.0001868146,0.0001546743,0.0003771317,0.0003408552,0.0003581678,0.0001135157,0.0001795002,0.0001947062],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003550077,"about_ca_system_score_gemma":0.0001918148,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003551794,"about_ca_topic_score_gemma":0.007351736,"domain_scores_codex":[0.9999301,0.000004908922,0.000002408952,0.000009490247,0.00003403307,0.00001896447],"domain_scores_gemma":[0.9998941,0.00004436406,0.00002073575,0.000009614387,0.00002091505,0.00001024865],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"observational","study_design_scores_codex":[0.0003636348,0.00005909965,0.003933133,0.0001106776,0.00002438561,0.0003123859,0.00008750737,0.0009611076,0.9867803,0.004085417,0.0003308007,0.00295148],"study_design_scores_gemma":[0.00008685323,0.0005153124,0.08035456,0.00001815563,0.0000520271,0.0006263179,0.0005196655,0.0206197,0.8893666,0.001779885,0.006040895,0.00002010565],"study_design_candidate":"observational","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9914926,0.001519366,0.0008420274,0.00009213838,0.00001521231,0.00001376713,0.0001739007,0.00002261614,0.005828483],"genre_scores_gemma":[0.9960474,0.0005650321,0.0008309193,0.00002136339,0.00001107238,0.000008627534,0.000238562,0.000007759306,0.002269147],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003551794,"threshold_uncertainty_score":0.007062197,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007401563811341741,"score_gpt":0.1836000268112108,"score_spread":0.1761984629998691,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}