{"id":"W2348242156","doi":"","title":"Solid-phase Crystallization of Amorphous Silicon Films by Rapid Thermal Annealing","year":2005,"lang":"en","type":"article","venue":"半导体光子学与技术(英文版)","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"L'Alliance Boviteq","funders":"","keywords":"Crystallization; Annealing (glass); Materials science; Silicon; Amorphous silicon; Amorphous solid; Raman scattering; Raman spectroscopy; Analytical Chemistry (journal); Chemical engineering; Optoelectronics; Crystallography; Optics; Composite material; Crystalline silicon; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001320709,0.0002713531,0.0003280925,0.0001626655,0.00006389296,0.00002815939,0.0003385152,0.0002481306,0.0003391554],"category_scores_gemma":[0.00004414637,0.0002881426,0.0001063009,0.0002688925,0.0001073801,0.0002667361,0.00003166234,0.0002447996,0.00003955214],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008261154,"about_ca_system_score_gemma":0.00001605118,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004039256,"about_ca_topic_score_gemma":0.00003430126,"domain_scores_codex":[0.9986353,0.00002373239,0.0004540403,0.0002538015,0.0002346497,0.0003985112],"domain_scores_gemma":[0.99929,0.00004762306,0.00008481486,0.0004533096,0.0000532455,0.00007095336],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002509082,0.00009134575,0.00005997937,0.00009082762,0.00005621006,0.00000582219,0.0009227919,0.05032072,0.9202257,0.00008271261,0.008166032,0.0199528],"study_design_scores_gemma":[0.001236591,0.0001283988,0.0001736318,0.00005554836,0.00004131938,0.000008486417,0.0003857254,0.07180819,0.9070945,0.00002274493,0.01864265,0.000402144],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9835058,0.002579305,0.009680185,0.0001347725,0.0002559471,0.0002588069,0.0001270194,0.001814172,0.001643987],"genre_scores_gemma":[0.9967891,0.000198534,0.002590417,0.00005663171,0.00007540001,0.0000244467,0.00006824749,0.00008627819,0.0001109751],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02148747,"threshold_uncertainty_score":0.9999571,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008885672609731533,"score_gpt":0.2550546277933409,"score_spread":0.2461689551836093,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}