{"id":"W2351531971","doi":"","title":"Improving efficiency of silicon nitride film deposition on glass","year":2009,"lang":"en","type":"article","venue":"Harbin Gongcheng Daxue Xuebao/Journal of Harbin Engineering University","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"L'Alliance Boviteq","funders":"","keywords":"Silicon nitride; Materials science; Plasma-enhanced chemical vapor deposition; Silane; Electron cyclotron resonance; Substrate (aquarium); Deposition (geology); Refractive index; Thin film; Chemical vapor deposition; Nitride; Silicon oxynitride; Silicon; Analytical Chemistry (journal); Plasma; Layer (electronics); Optoelectronics; Composite material; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001206999,0.0002821336,0.0003162345,0.0002739783,0.0001681976,0.0002618161,0.0002844306,0.0001610441,0.00107114],"category_scores_gemma":[0.0001561277,0.0002228619,0.0002252816,0.0002452551,0.000112827,0.0002446586,0.0002192693,0.0001758965,0.0003554578],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002899623,"about_ca_system_score_gemma":0.0001524254,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001667638,"about_ca_topic_score_gemma":0.002998203,"domain_scores_codex":[0.9998934,0.000007269416,0.000008762102,0.00002374927,0.00003603624,0.0000307339],"domain_scores_gemma":[0.9999335,0.00001979195,0.00001398302,0.00001005754,0.00001591394,0.000006704191],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001310485,0.000003420585,0.0001635495,0.00004150365,0.000004061588,0.00003929951,0.00001124953,0.0001257155,0.9980223,0.00005036729,0.00004089099,0.001484568],"study_design_scores_gemma":[0.00000271125,0.00003146595,0.001171336,0.000004301412,0.000009042579,0.00004537497,0.000008834118,0.001227795,0.9966043,0.00001014852,0.0008818828,0.000002725831],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.987541,0.002054065,0.005436647,0.00006091663,0.00003841264,0.00002478858,0.0001025612,0.0001934275,0.00454831],"genre_scores_gemma":[0.9875138,0.001509001,0.008319717,0.00002103757,0.000009718583,0.00001255881,0.0001367995,0.00004911239,0.002428253],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001667638,"threshold_uncertainty_score":0.003583252,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004041229218070835,"score_gpt":0.1556275101660406,"score_spread":0.1515862809479698,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}