{"id":"W2354428447","doi":"","title":"Soft X-ray multilayers and filters","year":2002,"lang":"en","type":"article","venue":"","topic":"X-ray Spectroscopy and Fluorescence Analysis","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"CAE (Canada)","funders":"","keywords":"Materials science; Auger electron spectroscopy; Rutherford backscattering spectrometry; Scattering; Spectroscopy; Sputtering; Optics; Sputter deposition; Attenuation; Thin film; Physics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001748932,0.0004554691,0.0002636678,0.0004957193,0.0002820892,0.0004548166,0.0003386537,0.0003017963,0.002955236],"category_scores_gemma":[0.0002881418,0.0003417975,0.0002160528,0.0002410895,0.0001469292,0.0003897003,0.0002786028,0.00025405,0.0008424276],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003769308,"about_ca_system_score_gemma":0.0001720102,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006209473,"about_ca_topic_score_gemma":0.0009105214,"domain_scores_codex":[0.9997979,0.00001318142,0.00002073203,0.00005088266,0.00008893453,0.00002847011],"domain_scores_gemma":[0.9998261,0.00001752848,0.00004303065,0.00004713929,0.00004259252,0.00002369325],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007761512,0.00001429681,0.0004399982,0.00009337738,0.00001084595,0.00007275769,0.00002532084,0.0004727118,0.9905651,0.0009035554,0.0002823377,0.007042042],"study_design_scores_gemma":[0.00002044174,0.0001916769,0.003050117,0.00001156668,0.00003615506,0.0002798226,0.00003368974,0.003018684,0.984089,0.0002304772,0.009022712,0.00001567475],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9191886,0.001954164,0.06327381,0.0001757152,0.0002137006,0.0002616033,0.0009587147,0.00148609,0.01248774],"genre_scores_gemma":[0.898921,0.0009946735,0.08207846,0.00009223811,0.0000331852,0.0001870878,0.0007237468,0.0001378172,0.01683167],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002955236,"threshold_uncertainty_score":0.009886205,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01060352494678071,"score_gpt":0.2255417224130161,"score_spread":0.2149381974662354,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}