{"id":"W2355128254","doi":"","title":"The Research on Alternating Phase-shifted Mask Design of 100 nm Resolution","year":2005,"lang":"en","type":"article","venue":"Research & Progress of Solid State Electronics","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"L'Alliance Boviteq","funders":"","keywords":"Lithography; Resolution (logic); Photolithography; Phase shift module; Phase (matter); Phase change; Optics; Computer science; Feature (linguistics); Materials science; Computational lithography; Physics; Nanotechnology; X-ray lithography; Artificial intelligence; Resist; Engineering physics; Insertion loss","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000455251,0.0003714334,0.0003125869,0.0003319046,0.0001715074,0.0004201104,0.0006426613,0.0005489994,0.001401738],"category_scores_gemma":[0.0006600438,0.0002636467,0.0002979806,0.0003767054,0.0003232737,0.0008877778,0.0002078062,0.0005124755,0.0004404824],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005895498,"about_ca_system_score_gemma":0.0004753554,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003745706,"about_ca_topic_score_gemma":0.0003640571,"domain_scores_codex":[0.9996037,0.00005479857,0.0000222234,0.0000917818,0.000199783,0.00002773851],"domain_scores_gemma":[0.9996259,0.00009967641,0.00007666282,0.00004280403,0.0001282907,0.00002666043],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001042306,0.00006861302,0.0005545681,0.0005160204,0.00003125286,0.00015579,0.0001482945,0.006501964,0.7754127,0.05716068,0.001439892,0.157906],"study_design_scores_gemma":[0.00009477489,0.001150953,0.002021106,0.00006881409,0.00008575838,0.001927363,0.0000668361,0.1516713,0.7239268,0.01535932,0.103543,0.00008396807],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1890273,0.01554775,0.76383,0.001076277,0.0005060694,0.0001605679,0.0001124949,0.0006667334,0.02907281],"genre_scores_gemma":[0.3738235,0.004958094,0.6090246,0.0003351568,0.0001906782,0.0001368879,0.0001638533,0.00009268395,0.01127457],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001401738,"threshold_uncertainty_score":0.004689336,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.1047770859498602,"score_gpt":0.4622201464669952,"score_spread":0.3574430605171349,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}