{"id":"W2373536588","doi":"","title":"A new generation industrial machine for the plasma immersion ionimplantation and enhanced deposition","year":2002,"lang":"en","type":"article","venue":"Vacuum","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"CAE (Canada)","funders":"","keywords":"Plasma; Plasma-immersion ion implantation; Vacuum chamber; Vacuum arc; Materials science; Deposition (geology); Pulse duration; Pulse (music); Voltage; Electric arc; Ion; Analytical Chemistry (journal); Optoelectronics; Chemistry; Optics; Composite material; Electrode; Laser; Electrical engineering; Physics; Ion implantation","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009995664,0.0005208577,0.0007277788,0.00097352,0.0005930583,0.0003958466,0.0009329088,0.0005463866,0.00426153],"category_scores_gemma":[0.0005281611,0.0003131211,0.0003728614,0.0006450588,0.0003987717,0.0008369652,0.0007686733,0.0007791945,0.00121525],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004185634,"about_ca_system_score_gemma":0.0004637802,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002111543,"about_ca_topic_score_gemma":0.0003306252,"domain_scores_codex":[0.9990821,0.00005112738,0.00002885432,0.0001630645,0.0005975339,0.00007735961],"domain_scores_gemma":[0.9994979,0.00005855326,0.00006131976,0.0001639452,0.0001500761,0.00006811394],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002078744,0.0001645847,0.002468233,0.0002948105,0.0000295802,0.0002462123,0.0002470374,0.0009602195,0.7285287,0.009104594,0.00974313,0.2480048],"study_design_scores_gemma":[0.0002941987,0.003449738,0.02335243,0.00005046533,0.0001619789,0.005419339,0.0000739582,0.02964153,0.5565553,0.001595926,0.3792636,0.0001416359],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2013413,0.004662271,0.7502816,0.001183824,0.0008442495,0.0005311368,0.0006071189,0.01034039,0.03020804],"genre_scores_gemma":[0.3827783,0.001239744,0.5923136,0.0002706793,0.0003785165,0.0003486034,0.001067403,0.000411184,0.02119181],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00426153,"threshold_uncertainty_score":0.01425624,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04127387246452675,"score_gpt":0.2076063312154568,"score_spread":0.1663324587509301,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}