{"id":"W2377162614","doi":"","title":"Study of the Properties of SiO_x Barrier Coatings by MPECVD","year":2012,"lang":"en","type":"article","venue":"Packaging Engineering","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"L'Alliance Boviteq","funders":"","keywords":"Fourier transform infrared spectroscopy; Materials science; Transmittance; Coating; Chemical vapor deposition; Layer (electronics); Chemical engineering; Deposition (geology); Infrared; Composite material; Optics; Nanotechnology; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001463598,0.0001708833,0.0002292082,0.00008782589,0.00002972175,0.000007642957,0.0002985907,0.00005990456,0.000004498196],"category_scores_gemma":[0.00009914739,0.0001314661,0.0000549653,0.0002419922,0.00003807,0.0001449339,0.00006236695,0.0002178115,0.000001779623],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004641105,"about_ca_system_score_gemma":0.000004599089,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002177533,"about_ca_topic_score_gemma":0.000002353153,"domain_scores_codex":[0.9991271,0.00001073744,0.0002727124,0.00009362512,0.0002083414,0.0002874938],"domain_scores_gemma":[0.9994879,0.00002841951,0.00004223997,0.0003790969,0.00002556971,0.00003680579],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000001565232,0.00005405789,0.01340101,0.0002742435,0.00005539019,2.519978e-7,0.005499903,0.02491479,0.9552197,0.00004817804,0.0002821099,0.0002488417],"study_design_scores_gemma":[0.0002469794,0.00002516918,0.005235427,0.0001607353,0.00003961315,0.000003078755,0.001956291,0.003532212,0.9878823,0.000002495917,0.0006937127,0.0002219913],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9958988,0.001767153,0.0009439524,0.00001354731,0.0004114496,0.0002094394,0.00000704208,0.000582214,0.0001663796],"genre_scores_gemma":[0.9994459,0.000007828759,0.0004110218,0.000002913324,0.00002407717,0.00002597742,3.628441e-7,0.00005404509,0.00002794686],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03266263,"threshold_uncertainty_score":0.5361031,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01072411669536944,"score_gpt":0.1744295119182941,"score_spread":0.1637053952229247,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}