{"id":"W2377522905","doi":"","title":"Fabrication of iron disilicide from multilayer by helicon plasma sputtering","year":2005,"lang":"en","type":"article","venue":"中国有色金属学会会刊(英文版)","topic":"Semiconductor materials and interfaces","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Helicon; Materials science; Sputtering; Scanning electron microscope; Annealing (glass); Analytical Chemistry (journal); Rutherford backscattering spectrometry; Fabrication; Thin film; Plasma; Metallurgy; Nanotechnology; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001468366,0.0006249868,0.0004624907,0.0004040837,0.0003204825,0.0003479963,0.0003612073,0.0003438132,0.001566752],"category_scores_gemma":[0.0001797654,0.0005819932,0.0003202793,0.0002548577,0.0001008434,0.0003074809,0.0003450952,0.0003769822,0.0008462234],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003797502,"about_ca_system_score_gemma":0.000170715,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001110468,"about_ca_topic_score_gemma":0.002416142,"domain_scores_codex":[0.9998598,0.000006304294,0.00001135288,0.0000329836,0.0000502207,0.00003940812],"domain_scores_gemma":[0.9998952,0.00000879294,0.00002355385,0.00001967075,0.00003104619,0.00002170131],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001024833,0.000004656561,0.00005255254,0.00003263693,0.000003699545,0.00003721739,0.00001412512,0.0000588312,0.9986665,0.00005825169,0.00008348779,0.0009778328],"study_design_scores_gemma":[0.00001275085,0.0000783988,0.001474085,0.000008883057,0.00001836278,0.0001586153,0.0000160939,0.001146145,0.9912969,0.00003145775,0.005750189,0.000008147161],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9533668,0.00141083,0.03235199,0.0001668666,0.0002123678,0.0002072865,0.001162221,0.0009156078,0.01020606],"genre_scores_gemma":[0.9371589,0.001646916,0.04924467,0.00007033911,0.00003979557,0.0001528549,0.001486064,0.0001500105,0.0100505],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001566752,"threshold_uncertainty_score":0.005241275,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009664105030764428,"score_gpt":0.2372580096186235,"score_spread":0.2275939045878591,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}