{"id":"W2379206721","doi":"","title":"Poly-Si Thin Film Prepared by XeCl Excimer Laser Crystallization and Its Ellipsometric Analysis","year":2000,"lang":"en","type":"article","venue":"","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"CAE (Canada)","funders":"","keywords":"Materials science; Thin-film transistor; Excimer laser; Crystallization; Thin film; Substrate (aquarium); Ellipsometry; Laser; Optoelectronics; Optics; Composite material; Nanotechnology; Chemical engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001204258,0.0002101879,0.0002015715,0.0002354557,0.0001662747,0.0001756888,0.0001668169,0.0001615993,0.0005301281],"category_scores_gemma":[0.0001806315,0.0001195102,0.0001104969,0.0003407048,0.0001653156,0.0002347622,0.00006449618,0.0003110245,0.0001201163],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002175702,"about_ca_system_score_gemma":0.0002308313,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001413075,"about_ca_topic_score_gemma":0.001521504,"domain_scores_codex":[0.9999282,0.000004707974,0.000004280389,0.00001601817,0.00003905034,0.000007646397],"domain_scores_gemma":[0.9999279,0.00002451548,0.00001294152,0.000007963497,0.00002307573,0.000003560264],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001619527,0.000005442371,0.0001258004,0.00003545124,0.000002110394,0.00003709607,0.00001649378,0.0002593068,0.997267,0.0002220473,0.00002997429,0.001983145],"study_design_scores_gemma":[0.000003032467,0.00002289792,0.001787323,0.000003219636,0.000005094911,0.00008661996,0.0000142417,0.004687399,0.9924791,0.00005330474,0.0008532216,0.00000446703],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9453182,0.002447073,0.04728558,0.00009261705,0.00004386283,0.00006866272,0.0007250524,0.0001715256,0.003847436],"genre_scores_gemma":[0.9599507,0.001749833,0.035553,0.00001052789,0.000009764321,0.00005102588,0.0005204413,0.00004070136,0.002113953],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001413075,"threshold_uncertainty_score":0.002809644,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006229086432443113,"score_gpt":0.1910685098217768,"score_spread":0.1848394233893337,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}