{"id":"W2429791510","doi":"10.1149/ma2008-02/35/2317","title":"High-Performance Oxide Thin Film Transistors Passivated by Various Gas Plasmas","year":2008,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"SAIT Polytechnic","funders":"","keywords":"Plasma; Materials science; Optoelectronics; Oxide; Transistor; Thin-film transistor; Engineering physics; Nanotechnology; Electrical engineering; Layer (electronics); Engineering; Metallurgy; Physics; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001845916,0.0002632144,0.0002812364,0.00006318886,0.0001632894,0.00004704105,0.0001863277,0.0001581605,0.00006736002],"category_scores_gemma":[0.00005013714,0.0002600197,0.000043428,0.0001253917,0.00004279886,0.0002138038,0.00001244381,0.0002252556,0.0001673886],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006241546,"about_ca_system_score_gemma":0.00002707851,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004604703,"about_ca_topic_score_gemma":0.00001140029,"domain_scores_codex":[0.9986579,0.00002000662,0.0004466411,0.0002369487,0.0002217579,0.0004167828],"domain_scores_gemma":[0.9994392,0.00009558116,0.00009193682,0.0002165303,0.00003238236,0.0001243739],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007266577,0.00001983339,0.0003788144,0.00007679927,0.00002764637,0.00002476999,0.000367105,0.3954611,0.5898356,7.355518e-7,0.01377827,0.00002207192],"study_design_scores_gemma":[0.0003686835,0.00002580787,0.01024634,0.0001072683,0.00001678226,0.00004826329,0.00003267484,0.00603191,0.973373,0.00001102525,0.009366964,0.0003712583],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9855058,0.0003650038,0.00000228353,0.00004516502,0.00106825,0.00009475544,0.00002335236,0.0007430292,0.01215233],"genre_scores_gemma":[0.9986748,0.000178629,0.0005954307,0.00005966496,0.0001495613,0.00001078151,0.00004322414,0.00006810692,0.0002198661],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3894292,"threshold_uncertainty_score":0.9999852,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01002360976727233,"score_gpt":0.1834634533923769,"score_spread":0.1734398436251046,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}