{"id":"W2431150984","doi":"10.1364/oic.2016.wa.6","title":"Durable AlN and Al_2O_3 Optical Films Deposited by Low Duty Cycle Pulsed Magnetron Sputtering","year":2016,"lang":"en","type":"article","venue":"","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Materials science; Duty cycle; Sputter deposition; Deposition (geology); Sputtering; Optoelectronics; Cavity magnetron; Thin film; Composite material; Metallurgy; Electrical engineering; Nanotechnology; Voltage; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0000705823,0.00016954,0.0002018579,0.00002459367,0.0000746051,0.0001059171,0.00009836443,0.00004507901,0.0042128],"category_scores_gemma":[0.000002994877,0.0001124019,0.0000457637,0.00004282621,0.00004199918,0.0001994593,0.00006128939,0.00004619146,0.0001014191],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001004721,"about_ca_system_score_gemma":0.00001121352,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005265699,"about_ca_topic_score_gemma":0.000006028486,"domain_scores_codex":[0.9990531,0.0000216466,0.0002091392,0.0002832058,0.00009424987,0.000338624],"domain_scores_gemma":[0.9995444,0.00005081374,0.00005040958,0.000183841,0.00002428115,0.0001462941],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001566058,0.00004481123,0.00835983,0.00001564682,0.00002243062,0.00000139328,0.0000124661,0.000001651274,0.9858357,0.0006399464,0.002115928,0.002934488],"study_design_scores_gemma":[0.001247147,0.00009132312,0.005156221,0.00005990194,0.00002895899,0.000002065586,0.00007723455,0.0002425,0.9901761,0.0003697498,0.002221352,0.0003274261],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9929551,0.00002983065,0.001025979,0.0003103883,0.0001387163,0.0001363372,0.00007221504,0.00004990885,0.005281562],"genre_scores_gemma":[0.9970108,0.00000472311,0.0005936744,0.0001279361,0.0001046928,0.0000142965,0.00003058147,0.00002175819,0.002091538],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004340373,"threshold_uncertainty_score":0.9966975,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004979255099117554,"score_gpt":0.2040494042688174,"score_spread":0.1990701491696998,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}