{"id":"W2465181174","doi":"10.3390/s16070959","title":"Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers","year":2016,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"Natural Sciences and Engineering Research Council of Canada; Ontario Centres of Excellence; CMC Microsystems","keywords":"Capacitive micromachined ultrasonic transducers; Materials science; Laser Doppler vibrometer; Ultrasonic sensor; Electromechanical coupling coefficient; Capacitive sensing; Transducer; Diaphragm (acoustics); Acoustics; Optoelectronics; Optics; Vibration; Piezoelectricity; Electrical engineering; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000476948,0.0006960124,0.0005195737,0.0004525317,0.0003088703,0.0004302619,0.001052564,0.0007893393,0.002090937],"category_scores_gemma":[0.001165353,0.0003835279,0.0001733176,0.0007501356,0.0003334119,0.000416193,0.0003840621,0.0004144488,0.0006036357],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005791721,"about_ca_system_score_gemma":0.0003603905,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00085671,"about_ca_topic_score_gemma":0.001728442,"domain_scores_codex":[0.9989043,0.00008067831,0.0000531755,0.0002398707,0.000632721,0.000089154],"domain_scores_gemma":[0.9992511,0.0001830223,0.0001622767,0.00006199634,0.0002870664,0.00005455074],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005796022,0.00002752954,0.00030809,0.0001513732,0.000008037318,0.0001178657,0.0000888728,0.0007083875,0.9933606,0.0001551396,0.000158395,0.004857652],"study_design_scores_gemma":[0.00001462075,0.0004784983,0.002058317,0.00001486251,0.00001722107,0.0001572474,0.00007981902,0.005899532,0.9881955,0.0000478128,0.003017986,0.00001860185],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9288259,0.002898647,0.06153937,0.0003139503,0.0003397681,0.0004381025,0.0007694568,0.0006260256,0.004248712],"genre_scores_gemma":[0.9299543,0.001314329,0.06461322,0.0001282479,0.00006216899,0.0003359284,0.0003687067,0.00004074596,0.0031824],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002090937,"threshold_uncertainty_score":0.006994843,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007481537455160886,"score_gpt":0.2211634179171594,"score_spread":0.2136818804619985,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}