{"id":"W2465693569","doi":"10.1142/s0218625x17500275","title":"DEPOSITION AND CHARACTERIZATION OF MAGNETRON CO-SPUTTERED InAlN FILM AT DIFFERENT Ar:N<sub>2</sub> GAS FLOW RATIOS","year":2016,"lang":"en","type":"article","venue":"Surface Review and Letters","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"McGill University","keywords":"Materials science; Sputter deposition; Cavity magnetron; Surface roughness; Analytical Chemistry (journal); Diffraction; Sputtering; Thin film; Deposition (geology); Optoelectronics; Nanotechnology; Composite material; Optics; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001301046,0.0002083911,0.000286917,0.0001520657,0.0001446752,0.0002570395,0.000236254,0.0003109607,0.0006623981],"category_scores_gemma":[0.0002134204,0.0001718125,0.0001473698,0.00009939838,0.0001265659,0.0002205679,0.0001056434,0.0001699892,0.0002476592],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001758859,"about_ca_system_score_gemma":0.0001155371,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005857549,"about_ca_topic_score_gemma":0.001249311,"domain_scores_codex":[0.9999081,0.000008809966,0.000009910385,0.00001953464,0.00004127367,0.00001240019],"domain_scores_gemma":[0.9998759,0.00002614755,0.00003699156,0.00001320041,0.00003910338,0.000008710194],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001036275,0.000001981329,0.00009848316,0.00001714471,0.000001066652,0.00003182201,0.000006876062,0.0000249462,0.9994948,0.000003844385,0.000005413847,0.0003031884],"study_design_scores_gemma":[0.000002287784,0.00008279875,0.003480511,0.000003185952,0.00001144015,0.00009306909,0.00002146018,0.0005098418,0.9951214,0.000005699198,0.0006651867,0.000003151887],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9921253,0.001119583,0.005121618,0.00005944295,0.00004543558,0.00002260606,0.0002941813,0.0001125466,0.001099253],"genre_scores_gemma":[0.9834751,0.001119737,0.01264254,0.00005385565,0.00001384645,0.00003216746,0.0003418502,0.00005850137,0.002262404],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006623981,"threshold_uncertainty_score":0.002215922,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00795492234122219,"score_gpt":0.2126393625324336,"score_spread":0.2046844401912114,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}