{"id":"W2469184644","doi":"10.1149/2.0151605jss","title":"The Effect of Slurry Properties on the CMP Removal Rate of Boron Doped Polysilicon","year":2016,"lang":"en","type":"article","venue":"ECS Journal of Solid State Science and Technology","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Alberta Innovates - Technology Futures","keywords":"Chemical-mechanical planarization; Materials science; Slurry; Abrasive; Doping; Boron; Wafer; Colloidal silica; Composite material; Saturation (graph theory); Silicon; Polishing; Chemical engineering; Metallurgy; Nanotechnology; Optoelectronics; Chemistry; Coating","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003407899,0.0004148198,0.0003774574,0.0002147757,0.000147418,0.0004415241,0.000238134,0.0004055411,0.001022686],"category_scores_gemma":[0.001071452,0.0003052063,0.0002567794,0.0002778264,0.0001488714,0.0004154878,0.0001813865,0.0004505848,0.0004054543],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001829393,"about_ca_system_score_gemma":0.0001862156,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009829496,"about_ca_topic_score_gemma":0.001827759,"domain_scores_codex":[0.9997141,0.00003825713,0.0000431359,0.00005988735,0.00009027881,0.00005423089],"domain_scores_gemma":[0.9994012,0.0002558581,0.0001413284,0.00003720426,0.0001351738,0.00002917807],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001653574,0.00001461078,0.0002319243,0.00006438887,0.000006951041,0.0000324828,0.00002616951,0.0001265264,0.9976198,0.00001376624,0.0000237876,0.001674303],"study_design_scores_gemma":[0.00000368507,0.0002728418,0.001392604,0.000002847243,0.00001276292,0.00002527983,0.00001979951,0.0005136637,0.9974816,0.000004111502,0.0002674686,0.000003369188],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9968783,0.0007987485,0.001355734,0.00003137531,0.00001797769,0.00001432287,0.0001846331,0.00004831154,0.000670716],"genre_scores_gemma":[0.9961809,0.0007191426,0.001663669,0.00002658252,0.000006183241,0.00001589766,0.000245394,0.00004729757,0.00109497],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001022686,"threshold_uncertainty_score":0.003421247,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007643211781497785,"score_gpt":0.2373314778812391,"score_spread":0.2296882660997413,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}