{"id":"W2474924212","doi":"10.31399/asm.cp.istfa2015p0082","title":"Extending Electrical Scanning Probe Microscopy Measurements of Semiconductor Devices Using Microwave Impedance Microscopy","year":2015,"lang":"en","type":"article","venue":"Proceedings - International Symposium for Testing and Failure Analysis","topic":"Near-Field Optical Microscopy","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Chipworks (Canada)","funders":"","keywords":"Materials science; Microscopy; Microwave; Scanning capacitance microscopy; Dopant; Optoelectronics; Planar; Capacitance; Semiconductor; Scanning probe microscopy; Dielectric spectroscopy; Electrical impedance; Scanning electron microscope; Analytical Chemistry (journal); Scanning confocal electron microscopy; Optics; Electrical engineering; Doping; Electrode; Chemistry; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001576771,0.0002401386,0.0001257883,0.000336612,0.0001372999,0.0003141362,0.0003354705,0.0002957881,0.001662396],"category_scores_gemma":[0.0005650537,0.0001340809,0.0000792032,0.0002716618,0.000237653,0.0005606554,0.0002618174,0.0003553798,0.0003241026],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002345528,"about_ca_system_score_gemma":0.0001046512,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004801544,"about_ca_topic_score_gemma":0.0007172641,"domain_scores_codex":[0.9998587,0.00001379266,0.000007831668,0.00002751455,0.00007181971,0.00002014429],"domain_scores_gemma":[0.9997128,0.0001045993,0.00003428845,0.00003373594,0.0001004282,0.00001412417],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001321364,0.000008340369,0.0001939271,0.00001756719,0.000001195021,0.00002288944,0.0000202195,0.0001697494,0.9965039,0.0002009287,0.00003709202,0.002811014],"study_design_scores_gemma":[0.000006592073,0.0001226963,0.003373803,0.000005364098,0.000006011494,0.0001082051,0.00006307521,0.008559397,0.9856784,0.0003044581,0.001765123,0.000006928352],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8927208,0.0005565214,0.1002171,0.0002323252,0.0000555909,0.00008030505,0.0004172995,0.0005874501,0.005132642],"genre_scores_gemma":[0.9786999,0.0002812459,0.01959343,0.00005333514,0.0000119044,0.00004035704,0.00009531985,0.0000197772,0.00120477],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001662396,"threshold_uncertainty_score":0.005561292,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04409935955391604,"score_gpt":0.2993455135974926,"score_spread":0.2552461540435765,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}