{"id":"W2479224809","doi":"10.1117/3.601520.ch12","title":"Alternative Lithography Techniques","year":2009,"lang":"en","type":"book-chapter","venue":"SPIE eBooks","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Extreme ultraviolet lithography; Lithography; Next-generation lithography; X-ray lithography; Optics; Diffraction; Photolithography; Maskless lithography; Electron-beam lithography; Computational lithography; Stencil lithography; Materials science; Resist; Physics; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001076574,0.0007398342,0.0005608773,0.0007334488,0.00006602843,0.00004628989,0.0005249632,0.0005029732,0.0001280258],"category_scores_gemma":[0.000003255126,0.000795442,0.0003948741,0.00003250525,0.0001944412,0.00007295249,0.00007637483,0.0008190258,0.00002967807],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001104428,"about_ca_system_score_gemma":0.00001572691,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004451356,"about_ca_topic_score_gemma":0.000003400998,"domain_scores_codex":[0.9982356,0.000004543014,0.0004873779,0.000476357,0.0003728223,0.0004233193],"domain_scores_gemma":[0.998824,0.00002390151,0.0001425808,0.0008008013,0.00008457371,0.0001241571],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.000008606402,0.000008457807,0.0000033907,0.0000887999,0.0002799261,0.00009033993,0.00005646818,0.000004380375,0.000652805,0.3132424,0.0036389,0.6819255],"study_design_scores_gemma":[0.00006113671,0.0001096339,0.000002297254,0.0003407451,0.00004912369,0.000009973482,0.000001025955,0.00001224902,0.02042246,0.3323215,0.6460521,0.0006177556],"study_design_candidate":"design_other","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.00001342772,0.001136388,0.006762885,0.000004079609,0.0003194694,0.0008196586,0.00009280637,0.004467241,0.986384],"genre_scores_gemma":[0.00395724,0.0034203,0.1771472,0.0006717053,0.001724443,0.0005612147,0.0001423484,0.001126063,0.8112494],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.6813077,"threshold_uncertainty_score":0.9994497,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01169445403843801,"score_gpt":0.2397672145458527,"score_spread":0.2280727605074147,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}