{"id":"W2483299676","doi":"10.2961/jlmn.2016.02.0014","title":"Processing of Back Surface of Si Wafers With a Pulsed Nd:YAG Laser","year":2016,"lang":"en","type":"article","venue":"Journal of Laser Micro/Nanoengineering","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Materials science; Wafer; Laser; Surface (topology); Pulsed laser; Optoelectronics; Optics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003667268,0.0003390467,0.0006772355,0.0002562716,0.00002597855,0.0000411805,0.0004038856,0.0001365663,0.00007225018],"category_scores_gemma":[0.00004592895,0.000231389,0.0001322242,0.0003606755,0.00009095527,0.000677009,0.00004882484,0.0002019366,0.000005451937],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001363693,"about_ca_system_score_gemma":0.0001058171,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006452794,"about_ca_topic_score_gemma":0.000003221851,"domain_scores_codex":[0.9981201,0.00002313133,0.0009388177,0.000167347,0.0003508593,0.0003997076],"domain_scores_gemma":[0.9987187,0.00007045401,0.0004335933,0.000269742,0.000369432,0.000138055],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001324832,0.00004333544,0.0005703669,0.001087377,0.0001090805,0.00002699072,0.000179656,0.03659512,0.9598779,0.00000241612,0.0004029366,0.0009723387],"study_design_scores_gemma":[0.001080109,0.0001989103,0.0003402375,0.002619523,0.00007004082,0.0001131059,0.00003532907,0.0009956826,0.9932498,0.00003630876,0.0009517706,0.0003091338],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9766802,0.0005280645,0.02197674,0.00008751779,0.0002283525,0.0001310419,0.00002356705,0.0001508181,0.0001937363],"genre_scores_gemma":[0.9706526,0.00009878374,0.0289178,0.00001050444,0.00009392438,0.00000137388,0.000001144635,0.0001173385,0.0001065421],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03559944,"threshold_uncertainty_score":0.9435769,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006214311710013781,"score_gpt":0.1915185838251678,"score_spread":0.185304272115154,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}