{"id":"W2485564250","doi":"10.1021/bk-2004-0874.ch013","title":"Ultra Low-k Dielectric Films with Ultra Small Pores Using Poragens Chemically Bonded to Siloxane Resin","year":2004,"lang":"en","type":"book-chapter","venue":"ACS symposium series","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Ministère de l'Économie, de la Science et de l'Innovation - Québec","keywords":"Siloxane; Materials science; Curing (chemistry); Dielectric; Composite material; Porosity; Coating; Low-k dielectric; Polymer chemistry; Polymer; Optoelectronics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004906761,0.0002497994,0.000149364,0.0002240574,0.0001055429,0.0005437287,0.0002899465,0.0001520362,0.001859401],"category_scores_gemma":[0.00006073973,0.0002279639,0.0001194735,0.0002455797,0.0001945831,0.000650265,0.0001595878,0.0003727826,0.001471596],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002580561,"about_ca_system_score_gemma":0.0001043999,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001333328,"about_ca_topic_score_gemma":0.0003707567,"domain_scores_codex":[0.9999709,0.000001792755,0.000001678523,0.000007242645,0.00001421091,0.000004166116],"domain_scores_gemma":[0.9999632,0.0000104478,0.000009450044,0.000004888724,0.000007426095,0.000004678022],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000184759,0.000008500369,0.0000591591,0.0003086443,0.000004394401,0.0001093196,0.00006962015,0.000291238,0.9444443,0.002903365,0.001193714,0.05058939],"study_design_scores_gemma":[0.000008712727,0.0001331722,0.0007946007,0.00004143976,0.00001549695,0.001474425,0.00004182727,0.001520143,0.8613921,0.001106996,0.1334577,0.00001328143],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5224746,0.0852695,0.2013888,0.001273568,0.0006915534,0.0001344988,0.0009723481,0.004838274,0.1829569],"genre_scores_gemma":[0.67031,0.05618397,0.111587,0.0003999634,0.0001205493,0.00007874744,0.0009685445,0.0005238282,0.1598275],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001859401,"threshold_uncertainty_score":0.006220281,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01279996600528861,"score_gpt":0.2137412085271078,"score_spread":0.2009412425218192,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}