{"id":"W2488472067","doi":"10.1117/3.601520.ch4","title":"Modeling and Thin Film Effects","year":2009,"lang":"en","type":"book-chapter","venue":"SPIE eBooks","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Resist; Bridge (graph theory); Lithography; Wafer; Truck; Computer science; Computation; Aperture (computer memory); Workstation; Numerical aperture; Mechanical engineering; Point (geometry); Optics; Engineering; Materials science; Nanotechnology; Algorithm; Electrical engineering; Physics; Automotive engineering; Geometry; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00006442353,0.0003919485,0.0003333097,0.0001989151,0.00004672068,0.00002737612,0.0001495096,0.0003119089,0.00001833125],"category_scores_gemma":[0.000003995229,0.0004191174,0.00009542847,0.000007165495,0.00004625878,0.00004615553,0.0000498999,0.0004622036,0.000008327776],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000440119,"about_ca_system_score_gemma":0.000007248145,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002503278,"about_ca_topic_score_gemma":0.000003383082,"domain_scores_codex":[0.9990861,0.000002109966,0.0002299166,0.0002751716,0.0001691091,0.0002375782],"domain_scores_gemma":[0.9994823,0.00002041019,0.00003200383,0.0003673701,0.00002128301,0.00007658348],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.00002388815,0.0000110083,0.000004179316,0.001413574,0.0004901142,0.0002578084,0.0003860086,0.01459188,0.001604102,0.4723475,0.001965177,0.5069047],"study_design_scores_gemma":[0.0005007055,0.0002381457,0.000004272492,0.002066019,0.0002093396,0.00003615698,0.000004527338,0.1273742,0.005563327,0.6889091,0.1732027,0.001891469],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.0003367637,0.002024105,0.01112303,0.000001865355,0.0002250168,0.0004893714,0.00001334147,0.001293407,0.9844931],"genre_scores_gemma":[0.0970756,0.003242915,0.1325919,0.0007500902,0.001138992,0.0002861198,0.00008617636,0.001223854,0.7636043],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.5050133,"threshold_uncertainty_score":0.9998261,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009367988206321046,"score_gpt":0.2215380507224017,"score_spread":0.2121700625160807,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}