{"id":"W2501623948","doi":"","title":"High-performance wet cleaning technology","year":2016,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Environmental science; Computer science; Process engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003720189,0.00008973914,0.0001124592,0.0001638579,0.00002844438,0.000009613175,0.0001221229,0.00008992039,0.0008994704],"category_scores_gemma":[0.00000723798,0.00005210156,0.00002404711,0.0002588657,0.00002437055,0.0001201342,0.000008632853,0.00007685733,0.0005149731],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000412857,"about_ca_system_score_gemma":0.000004930854,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001087842,"about_ca_topic_score_gemma":0.00001385919,"domain_scores_codex":[0.999527,0.000002548647,0.0001199198,0.00009992313,0.00005532437,0.0001952336],"domain_scores_gemma":[0.999747,0.00001011396,0.000009493184,0.000175688,0.00003196194,0.0000256939],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000001483741,0.000006619242,0.001988566,0.00001136785,0.0001337175,0.000004904782,0.0000468571,0.0007448029,0.7813934,0.03598234,0.007947996,0.1717379],"study_design_scores_gemma":[0.0003101457,0.00004387465,0.0002739946,0.00005495612,0.00003123025,0.00001338828,0.0001674454,0.004352808,0.9575015,0.0009336299,0.03597616,0.0003408669],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9759539,0.00004868493,0.00525099,0.0002856746,0.000175561,0.00002324018,0.00000178154,0.0007360541,0.01752413],"genre_scores_gemma":[0.9975469,0.00008945878,0.0003974221,0.0000306824,0.00004904053,0.000004739735,0.00000101415,0.00001759372,0.001863117],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1761081,"threshold_uncertainty_score":0.984857,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004938645210831961,"score_gpt":0.1690057485778585,"score_spread":0.1640671033670265,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}