{"id":"W2511614264","doi":"10.3390/mi7090160","title":"Micromachined Resonators: A Review","year":2016,"lang":"en","type":"review","venue":"Micromachines","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":220,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure; Simon Fraser University","funders":"Fonds de recherche du Québec – Nature et technologies; Natural Sciences and Engineering Research Council of Canada; City University of Hong Kong","keywords":"Resonator; Variety (cybernetics); Surface micromachining; Limit (mathematics); Field (mathematics); Engineering; Nanotechnology; Fabrication; Computer science; Mechanical engineering; Electrical engineering; Materials science; Artificial intelligence","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005262613,0.0009865969,0.0008935584,0.001989188,0.000393984,0.001000582,0.0008124796,0.000981006,0.004509823],"category_scores_gemma":[0.000745991,0.0004039728,0.0003923748,0.002121891,0.00037515,0.001512837,0.0006876339,0.001254469,0.002868093],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004265769,"about_ca_system_score_gemma":0.001302164,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008259636,"about_ca_topic_score_gemma":0.001353139,"domain_scores_codex":[0.9998016,0.00002084931,0.00002824903,0.0000506493,0.00007790323,0.00002072776],"domain_scores_gemma":[0.9996501,0.0001504332,0.00005045651,0.0000128811,0.0001095383,0.00002660611],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00004678676,0.00009402388,0.0002703487,0.02530045,0.00006732278,0.0002718257,0.0001279577,0.0005693834,0.005985888,0.008371267,0.03904598,0.9198486],"study_design_scores_gemma":[0.000004153459,0.00006137235,0.0003400614,0.002046814,0.00004229233,0.0006779388,0.00005362464,0.00007471205,0.0008271223,0.001687872,0.9941692,0.00001492545],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.0001697346,0.9975084,0.0002783267,0.0002503675,0.0003560159,0.000005410523,0.00002381409,0.000009758986,0.001398041],"genre_scores_gemma":[0.001092055,0.9968265,0.0004452838,0.0001842264,0.0002373307,0.000008187757,0.00003445965,0.000002546354,0.001169376],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.004509823,"threshold_uncertainty_score":0.01508689,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01718481608414361,"score_gpt":0.3031446519034719,"score_spread":0.2859598358193283,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}