{"id":"W2511614264","doi":"10.3390/mi7090160","title":"Micromachined Resonators: A Review","year":2016,"lang":"en","type":"review","venue":"Micromachines","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":220,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure; Simon Fraser University","funders":"Fonds de recherche du Québec – Nature et technologies; Natural Sciences and Engineering Research Council of Canada; City University of Hong Kong","keywords":"Resonator; Variety (cybernetics); Surface micromachining; Limit (mathematics); Field (mathematics); Engineering; Nanotechnology; Fabrication; Computer science; Mechanical engineering; Electrical engineering; Materials science; Artificial intelligence","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001468924,0.0008595205,0.002321928,0.000261782,0.00007141813,0.0000257176,0.000754867,0.0004426583,0.0001417111],"category_scores_gemma":[0.00008979614,0.0005370943,0.0006685905,0.0004082693,0.00008637355,0.0001078808,0.0001709489,0.000557617,0.0007197415],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001412129,"about_ca_system_score_gemma":0.00004123868,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000334916,"about_ca_topic_score_gemma":0.000004299189,"domain_scores_codex":[0.9980907,0.00002553743,0.0007718154,0.000476281,0.0001334582,0.0005022462],"domain_scores_gemma":[0.9987047,0.0001339009,0.000165654,0.0008826999,0.00002688052,0.00008622018],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[3.203543e-7,0.000006897184,4.608351e-8,0.06009068,0.000104352,0.00002300047,0.000001846994,3.596893e-8,0.0002088327,0.00004939872,0.0275274,0.9119872],"study_design_scores_gemma":[0.00007561127,0.00001146321,1.419768e-7,0.1229645,0.0002185065,0.0001406125,3.328735e-7,2.501052e-7,0.00005203934,0.0002600519,0.8756762,0.0006004001],"study_design_candidate":"design_other","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.000002764283,0.9948834,0.00007679826,0.00004052839,0.0005245897,0.0007536264,0.0002318052,0.00220335,0.00128315],"genre_scores_gemma":[1.067761e-7,0.9969144,0.001417411,0.00005798178,0.0002066469,0.0002342217,0.00008195294,0.0002354087,0.0008519006],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.9113868,"threshold_uncertainty_score":0.9997081,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01718481608414361,"score_gpt":0.3031446519034719,"score_spread":0.2859598358193283,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}