{"id":"W2513419535","doi":"10.4028/www.scientific.net/ssp.255.304","title":"Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler","year":2016,"lang":"en","type":"article","venue":"Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena","topic":"Advanced Materials Characterization Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Applied Nanotools (Canada)","funders":"","keywords":"Metrology; Critical dimension; Materials science; Fin; Repeatability; Resolution (logic); Surface metrology; Process (computing); Oxide; Optics; Optoelectronics; Nanotechnology; Computer science; Surface finish; Composite material; Physics; Profilometer; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":["metaepi_narrow"],"category_scores_codex":[0.002995719,0.001591584,0.002079024,0.0005315872,0.0008182172,0.0005768029,0.002121778,0.0002977457,0.0001578481],"category_scores_gemma":[0.0004780934,0.00140267,0.0001918836,0.0005367863,0.0005079329,0.003736434,0.001785279,0.0005256169,0.0001847129],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007665647,"about_ca_system_score_gemma":0.0002039732,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001420416,"about_ca_topic_score_gemma":0.0001713068,"domain_scores_codex":[0.9897985,0.0007984584,0.003078718,0.002864357,0.0009157785,0.00254423],"domain_scores_gemma":[0.9923978,0.0008435939,0.001156399,0.004286601,0.0004030753,0.0009124641],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.006032153,0.001007225,0.0006115384,0.002199293,0.001252028,0.0000311462,0.002467465,0.002983557,0.846204,0.0006473698,0.1073323,0.02923184],"study_design_scores_gemma":[0.03242027,0.001431024,0.002530652,0.001654449,0.0007854089,0.00006258988,0.0006752328,0.1902986,0.09826637,0.04584007,0.6159593,0.01007593],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.326316,0.0009120968,0.4509758,0.0003010104,0.001201948,0.003850815,0.2144737,0.001851148,0.0001174596],"genre_scores_gemma":[0.8188459,0.03817398,0.008878746,0.0011306,0.001187109,0.002316918,0.1263509,0.001207366,0.001908412],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.7479377,"threshold_uncertainty_score":0.9996832,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03342423505880378,"score_gpt":0.3082902275252909,"score_spread":0.2748659924664871,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}