{"id":"W2514960441","doi":"10.1149/07509.0117ecst","title":"Combined Surface Activated Bonding Technique for Hydrophilic SiO<sub>2</sub>-SiO<sub>2</sub> and Cu-Cu Bonding","year":2016,"lang":"en","type":"article","venue":"ECS Transactions","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"Optech (Canada)","funders":"","keywords":"Anodic bonding; Annealing (glass); Materials science; Direct bonding; Wafer bonding; Void (composites); Wafer; Bonding strength; Scanning electron microscope; Transmission electron microscopy; Composite material; Analytical Chemistry (journal); Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000149715,0.0004469259,0.0004154423,0.0003092584,0.0002618888,0.0002473272,0.0004355081,0.0004123531,0.002465391],"category_scores_gemma":[0.0001780542,0.0003636688,0.0002952553,0.0002723888,0.000341055,0.0003910463,0.0004484626,0.0006506752,0.0007502714],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001126479,"about_ca_system_score_gemma":0.0001932508,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001619033,"about_ca_topic_score_gemma":0.0005385153,"domain_scores_codex":[0.9998573,0.0000177728,0.000006293712,0.00002995075,0.00006715149,0.00002148554],"domain_scores_gemma":[0.9998749,0.00002775689,0.0000292231,0.00002506947,0.00003284339,0.00001015781],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002141974,0.00001591158,0.0001286053,0.00009975076,0.000008978758,0.00003260774,0.00002378682,0.00009301217,0.9940217,0.0001551912,0.0001268007,0.005272198],"study_design_scores_gemma":[0.00001123441,0.0003033804,0.001522051,0.000005047049,0.00002166026,0.0003684568,0.00003862169,0.001939537,0.9888579,0.0001471057,0.006774163,0.0000108968],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.8637344,0.003155128,0.1223206,0.0002892161,0.000258543,0.0002293067,0.0002371977,0.001063075,0.008712478],"genre_scores_gemma":[0.9100523,0.001249657,0.07847677,0.00009903812,0.00007296368,0.0001814639,0.0001473789,0.00009795078,0.009622523],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.002465391,"threshold_uncertainty_score":0.008247554,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01043603237648257,"score_gpt":0.2092559784798357,"score_spread":0.1988199461033531,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}