{"id":"W2517304238","doi":"10.1149/ma2016-02/29/1915","title":"Processing Hundreds of Nanometres Thick Electrografted P4VP for High Aspect Ratio TSV Insulation","year":2016,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Materials science; Monomer; Electrochemistry; Dielectric; Polymerization; Polymer; Silicon; Aqueous solution; Chemical engineering; Polymer chemistry; Electrode; Composite material; Organic chemistry; Optoelectronics; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009352589,0.0004359238,0.0002044515,0.000170966,0.0001030533,0.0003643091,0.0003022112,0.0004091559,0.001154433],"category_scores_gemma":[0.0001470161,0.0001939191,0.0002227077,0.0001647833,0.0001287543,0.0003493726,0.0002128376,0.000450614,0.0006363546],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000187273,"about_ca_system_score_gemma":0.0001156136,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001838973,"about_ca_topic_score_gemma":0.00038605,"domain_scores_codex":[0.9999518,0.000002093944,0.000002727719,0.000014,0.00001960423,0.000009824394],"domain_scores_gemma":[0.9999332,0.00001539211,0.00002149364,0.00001067713,0.00001207432,0.00000715502],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000073571,0.000005906597,0.00006663439,0.00005360386,0.000004673113,0.0000767105,0.00001202494,0.0004382076,0.9967557,0.00008781701,0.00005456719,0.002436852],"study_design_scores_gemma":[0.000003159771,0.0001363799,0.001156721,0.000007045431,0.00001227177,0.0002157573,0.00002446704,0.003275211,0.9913396,0.0001340433,0.003689939,0.000005270498],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9440379,0.002518543,0.04774838,0.00008573072,0.0001742844,0.00008612259,0.000568517,0.0005201565,0.004260394],"genre_scores_gemma":[0.9535116,0.001548299,0.04107524,0.00004579197,0.00001620366,0.00005360776,0.0005288644,0.00009254281,0.003127789],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001154433,"threshold_uncertainty_score":0.003861904,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01180376096812387,"score_gpt":0.2235421879595106,"score_spread":0.2117384269913867,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}