{"id":"W2518965295","doi":"10.1088/0960-1317/25/9/095004","title":"Nano-scale measurement of sub-micrometer MEMS in-plane dynamics using synchronized illumination","year":2015,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"Natural Sciences and Engineering Research Council of Canada; Deutsche Forschungsgemeinschaft","keywords":"Microelectromechanical systems; Micrometer; Nano-; Nanoscopic scale; Scale (ratio); Nanotechnology; Materials science; Dynamics (music); Optics; Optoelectronics; Physics; Acoustics; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001633,0.0003211143,0.000262541,0.000264975,0.0001518267,0.0002975242,0.0004106394,0.0002254681,0.0009730309],"category_scores_gemma":[0.0004575344,0.0002305173,0.0001193278,0.0002398117,0.0002821863,0.0004428338,0.0003916725,0.0005160494,0.0002325229],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004336431,"about_ca_system_score_gemma":0.000297802,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000670686,"about_ca_topic_score_gemma":0.001249948,"domain_scores_codex":[0.9997258,0.0000215598,0.0000128152,0.00006105618,0.0001537541,0.00002495805],"domain_scores_gemma":[0.9997763,0.00008507758,0.00004278165,0.00003022786,0.00004493709,0.0000206716],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001361863,0.00001011493,0.0001774027,0.0000235053,0.000002882066,0.00001377627,0.00002184222,0.0001519349,0.9962675,0.000141189,0.00003348072,0.003142738],"study_design_scores_gemma":[0.00001228494,0.0001526709,0.003845077,0.000005036644,0.00001234896,0.0001209364,0.00003008905,0.009940448,0.9840479,0.0001856701,0.001635676,0.00001183246],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7855438,0.0007901565,0.2093661,0.0001352555,0.00009323172,0.0001304663,0.0003845092,0.0005273425,0.003029026],"genre_scores_gemma":[0.8877416,0.0006563551,0.1098971,0.00004931469,0.00003363245,0.0001354562,0.0001798988,0.00005339721,0.001253231],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009730309,"threshold_uncertainty_score":0.003255069,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01451665108433066,"score_gpt":0.2029817425210806,"score_spread":0.18846509143675,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}