{"id":"W2519481275","doi":"","title":"Charge trapping and electron mobility degradation in MOCVD hafnium silicate gate dielectric stack structures","year":2003,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":false,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Hafnium; Trapping; Stack (abstract data type); Materials science; Silicate; Dielectric; Degradation (telecommunications); High-κ dielectric; Electron; Optoelectronics; Gate dielectric; Electron mobility; Metalorganic vapour phase epitaxy; Chemical physics; Transistor; Chemistry; Layer (electronics); Nanotechnology; Electrical engineering; Physics; Computer science; Zirconium; Metallurgy; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009624355,0.0001614263,0.0001653512,0.0002048588,0.0002631156,0.0002620141,0.0002900842,0.0003203114,0.0007494665],"category_scores_gemma":[0.0002930237,0.0001210052,0.0001184081,0.0001354239,0.0002304026,0.0003423527,0.0001257362,0.0002067284,0.0001306072],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004718827,"about_ca_system_score_gemma":0.0001682079,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003184543,"about_ca_topic_score_gemma":0.003058267,"domain_scores_codex":[0.9999379,0.000003099525,0.000002770131,0.00001340494,0.00002156211,0.00002122778],"domain_scores_gemma":[0.9998462,0.00004114634,0.00003919144,0.00001396122,0.00004119258,0.00001816498],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001929306,0.00002620584,0.001393988,0.00002546238,0.00001277594,0.0001576125,0.00009580781,0.0007865231,0.9954877,0.0002466234,0.0001239713,0.001450169],"study_design_scores_gemma":[0.00001267349,0.0001786102,0.008197977,0.000005270454,0.00001660542,0.000195576,0.00008503697,0.009007999,0.9818024,0.00007578492,0.0004153467,0.00000667884],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.999433,0.0001216583,0.0001692199,0.00001400692,0.000003768512,0.000001258057,0.0000304788,0.00001215181,0.0002144626],"genre_scores_gemma":[0.999353,0.00004589079,0.00008207558,0.000005320696,0.000001769316,0.000001558099,0.00003693542,0.000003191135,0.00047025],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003184543,"threshold_uncertainty_score":0.00633204,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01170004228962396,"score_gpt":0.2251521762572997,"score_spread":0.2134521339676758,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}