{"id":"W2520382090","doi":"10.1049/el.2016.1226","title":"Wafer‐level vacuum encapsulated breath‐mode ring resonator fabricated in a commercial MEMS process","year":2016,"lang":"en","type":"article","venue":"Electronics Letters","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"University of Dayton","keywords":"Microelectromechanical systems; Wafer; Resonator; Materials science; Optoelectronics; Wafer-level packaging; Ring (chemistry); Wafer-scale integration; Process (computing); Electronic engineering; Engineering; Computer science; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009023239,0.0002491208,0.000256155,0.0002076018,0.0000549087,0.0000166912,0.0003250713,0.0001556919,0.00001177166],"category_scores_gemma":[0.00003365209,0.000202908,0.00004928833,0.0004269588,0.00005224747,0.0002112685,0.00004076992,0.0004002071,0.0000205037],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004512588,"about_ca_system_score_gemma":0.00003121113,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002187572,"about_ca_topic_score_gemma":0.0001217596,"domain_scores_codex":[0.998493,0.000007353472,0.0002691713,0.000291467,0.0001627088,0.0007763468],"domain_scores_gemma":[0.9995441,0.00005274757,0.00004050656,0.0002872276,0.00002352521,0.00005185941],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000182138,0.00001780713,0.0001822898,0.00001932055,0.00002799263,0.0000195974,0.0001329809,0.0006229192,0.9823704,0.0002647992,0.0004767543,0.01584697],"study_design_scores_gemma":[0.001634772,0.00006787042,0.003426927,0.0001439999,0.00001480053,0.00002109638,0.0000307252,0.001539801,0.9817573,0.002306398,0.008371686,0.0006845802],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9898695,0.0005931311,0.006008006,0.002149673,0.0001065724,0.0002016986,0.00001277447,0.0009390073,0.0001196028],"genre_scores_gemma":[0.99887,0.000323655,0.0003699687,0.000212251,0.00004451969,0.00006643245,0.000005977976,0.00006459526,0.00004262563],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01516239,"threshold_uncertainty_score":0.8274347,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01030485920437691,"score_gpt":0.2366750802495085,"score_spread":0.2263702210451316,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}