{"id":"W2525318221","doi":"10.1088/1742-6596/619/1/012001","title":"Thin film germanium on silicon created via ion implantation and oxide trapping","year":2015,"lang":"en","type":"article","venue":"Journal of Physics Conference Series","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Germanium; Materials science; Wafer; Silicon on insulator; Optoelectronics; Silicon; Oxide; Ion implantation; Germanium oxide; Layer (electronics); Fabrication; Nanotechnology; Ion; Chemistry; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007770013,0.0003396557,0.0002252642,0.0002060039,0.000189423,0.0003481169,0.0003981835,0.0002996497,0.0007369097],"category_scores_gemma":[0.00007953204,0.0002646249,0.0002396873,0.0001793952,0.000286336,0.0002038246,0.0004003772,0.0002606858,0.0002121538],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001922304,"about_ca_system_score_gemma":0.0001625329,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002812782,"about_ca_topic_score_gemma":0.0004556545,"domain_scores_codex":[0.9999322,0.000004254733,0.00000262022,0.00001576008,0.00002800956,0.0000171897],"domain_scores_gemma":[0.9999485,0.00001216212,0.00001700214,0.000009420357,0.000005715392,0.000007093613],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002423139,0.000009553619,0.0001137049,0.0000546391,0.000007825865,0.0001401179,0.00002491644,0.0003181745,0.9971445,0.0006253702,0.00004469975,0.001492279],"study_design_scores_gemma":[0.0000228526,0.0001997721,0.0008632956,0.000007684805,0.00001959312,0.0002987549,0.00001651595,0.002137417,0.9929354,0.0002006398,0.003287399,0.00001060421],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9805295,0.001280078,0.01356531,0.00006847169,0.0000893484,0.00004428878,0.0001367407,0.0001787974,0.004107395],"genre_scores_gemma":[0.9721975,0.001359774,0.02351684,0.00003753405,0.00001981599,0.00003265808,0.0001595361,0.00004156512,0.002634797],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007369097,"threshold_uncertainty_score":0.002465248,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02370668274911011,"score_gpt":0.234136033003761,"score_spread":0.2104293502546509,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}