{"id":"W2527810829","doi":"10.1109/tcpmt.2016.2610321","title":"Vacuum-Assisted Through Silicon via Filling Method With Ag-Based Epoxy","year":2016,"lang":"en","type":"article","venue":"IEEE Transactions on Components Packaging and Manufacturing Technology","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Government of Alberta; CMC Microsystems","keywords":"Materials science; Epoxy; Microfabrication; Silicon; Electroplating; Composite material; Electrical resistivity and conductivity; Doping; Optoelectronics; Electrical engineering; Fabrication","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000138289,0.0004523879,0.0002502896,0.0002625298,0.0001512834,0.0002005445,0.0003036741,0.0002775696,0.0005553568],"category_scores_gemma":[0.0002443472,0.0002311602,0.0002540752,0.0001575336,0.0001716935,0.0003879178,0.0002499271,0.0002928411,0.0003391336],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001023848,"about_ca_system_score_gemma":0.0001665097,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002431299,"about_ca_topic_score_gemma":0.0004786024,"domain_scores_codex":[0.9998419,0.00001207535,0.00001339124,0.00004757401,0.00006430737,0.0000206663],"domain_scores_gemma":[0.9998692,0.00002007124,0.00004653882,0.0000261472,0.00002937438,0.000008763845],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009839358,0.00001044291,0.0001884858,0.00006182747,0.00000381384,0.00009492304,0.0000542499,0.0001157966,0.9940587,0.0001878088,0.00008594528,0.005128094],"study_design_scores_gemma":[0.000004125355,0.0002049392,0.001334309,0.000005616473,0.00001475029,0.000467343,0.00002764857,0.001614877,0.9922132,0.00004373649,0.004054548,0.00001478398],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8948228,0.001337213,0.09765427,0.0001041538,0.0001887494,0.0001113919,0.0001451815,0.001339952,0.004296249],"genre_scores_gemma":[0.9240786,0.0007639564,0.07130868,0.00004428389,0.00002594042,0.00006417529,0.0001022144,0.0001042485,0.003508018],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005553568,"threshold_uncertainty_score":0.001857877,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01633344362230138,"score_gpt":0.2295769942857857,"score_spread":0.2132435506634843,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}