{"id":"W2539202396","doi":"10.1116/1.4964402","title":"Silicon nanostructures with very large negatively tapered profile by inductively coupled plasma-RIE","year":2016,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Ontario Ministry of Research and Innovation; Canada Foundation for Innovation","keywords":"Undercut; Etching (microfabrication); Materials science; Reactive-ion etching; Silicon; Inductively coupled plasma; Dry etching; Plasma; Plasma etching; Fabrication; Optoelectronics; Nanotechnology; Composite material; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0008939075,0.0002824665,0.0004469367,0.0006619307,0.0004438347,0.00009057271,0.0004362002,0.0002933281,0.00001276048],"category_scores_gemma":[0.00008055528,0.0001795811,0.00002024623,0.0007593912,0.001115927,0.0004299367,0.00008085096,0.0002815312,0.000001256006],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002253663,"about_ca_system_score_gemma":0.0003454735,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":8.691439e-7,"about_ca_topic_score_gemma":0.000004692022,"domain_scores_codex":[0.9982657,0.00002048682,0.0004519174,0.0003485333,0.0002908634,0.0006224684],"domain_scores_gemma":[0.9990119,0.00002145573,0.0003531398,0.0001791976,0.0003580514,0.00007623886],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006700963,0.00004136963,0.00009539342,0.0000396805,0.0000477129,0.000001600765,0.00006918548,6.141248e-7,0.9653975,0.001558562,0.00003344706,0.03264787],"study_design_scores_gemma":[0.00103954,0.0004417253,0.0001007648,0.0001778479,0.00005001689,0.0001673688,0.0001441005,0.00003458164,0.9906617,0.004432073,0.002500099,0.0002501131],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9895905,0.005095177,0.003359226,0.001425735,0.0000914265,0.0002356076,0.00001962933,0.0001611396,0.00002155271],"genre_scores_gemma":[0.9977742,0.0009946561,0.001107765,0.00002093602,0.000029129,0.00003239978,6.360618e-7,0.00002657022,0.00001371743],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03239776,"threshold_uncertainty_score":0.7323106,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006194376035168805,"score_gpt":0.1939052010256601,"score_spread":0.1877108249904913,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}