{"id":"W2539751369","doi":"10.1109/mmwatt.2014.7057193","title":"Millimeterwave micro-coax development using simplified 3D fabrication process","year":2014,"lang":"en","type":"article","venue":"","topic":"Semiconductor Lasers and Optical Devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"CMC Microsystems","keywords":"Fabrication; Wafer; Microelectromechanical systems; Materials science; Wafer fabrication; Layer (electronics); Wafer bonding; Development (topology); Optoelectronics; Electronic engineering; Engineering; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001465612,0.0003750162,0.0003212337,0.0002565572,0.000259797,0.0006277299,0.0004479578,0.0004724509,0.001879937],"category_scores_gemma":[0.0002062852,0.0002890958,0.0002994379,0.0001456684,0.0002065211,0.0004171601,0.000327318,0.0004969363,0.0007039936],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003835758,"about_ca_system_score_gemma":0.0004875312,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007911594,"about_ca_topic_score_gemma":0.001848354,"domain_scores_codex":[0.9998123,0.000007839084,0.000006423685,0.0000322291,0.0001195811,0.00002165423],"domain_scores_gemma":[0.9998442,0.00003210968,0.00003593234,0.00003568829,0.00004108301,0.00001098698],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002608121,0.00002030507,0.000262933,0.0001482779,0.00001173503,0.0001629706,0.00007626398,0.002462869,0.9767439,0.00300235,0.0006963033,0.01638602],"study_design_scores_gemma":[0.00001696627,0.000175086,0.002601323,0.00002374683,0.00002180414,0.0009259941,0.00003976182,0.01771529,0.9418766,0.0005007435,0.03606605,0.0000366332],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4541493,0.003862652,0.4885253,0.0005680874,0.0006256523,0.0003181283,0.001300876,0.002772447,0.04787761],"genre_scores_gemma":[0.5983942,0.002092193,0.3868951,0.0001295417,0.0000551269,0.000236959,0.0007850757,0.0002136819,0.0111982],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001879937,"threshold_uncertainty_score":0.006289005,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01897466231877071,"score_gpt":0.2347188230599027,"score_spread":0.215744160741132,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}