{"id":"W2539894455","doi":"10.1002/sia.6186","title":"Characterization of high‐aspect‐ratio periodic structures by X‐ray photoelectron spectroscopy","year":2016,"lang":"en","type":"article","venue":"Surface and Interface Analysis","topic":"Electron and X-Ray Spectroscopy Techniques","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba; Children's Hospital Research Institute of Manitoba","funders":"Canada Excellence Research Chairs, Government of Canada; Canada Foundation for Innovation; University of Manitoba","keywords":"X-ray photoelectron spectroscopy; Substrate (aquarium); Silicon; Characterization (materials science); Analytical Chemistry (journal); Base (topology); Materials science; Surface (topology); Rod; Planar; Spectroscopy; Chemistry; Nanotechnology; Optoelectronics; Physics; Geometry; Computer science; Nuclear magnetic resonance; Mathematics; Geology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0002593703,0.0002886424,0.0006021512,0.0001964997,0.0001264368,0.00011128,0.0002827162,0.0001189688,0.002615423],"category_scores_gemma":[0.00002323909,0.0002004164,0.0001394756,0.0005930632,0.0002109638,0.000538604,0.0000632692,0.0001089204,0.00002924716],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001032455,"about_ca_system_score_gemma":0.00004911101,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003764433,"about_ca_topic_score_gemma":0.0001370178,"domain_scores_codex":[0.9981084,0.0001193218,0.0004522233,0.0005713377,0.0003047912,0.0004439016],"domain_scores_gemma":[0.999028,0.00004279732,0.0002974666,0.0004211081,0.0001152634,0.00009533011],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009134657,0.00004003226,0.001672501,0.00001204875,0.0001596874,4.172701e-7,0.0001475064,0.000009917459,0.9965047,0.0009355874,0.0002941859,0.0001321031],"study_design_scores_gemma":[0.0002297022,0.0004388478,0.00223437,0.00002085956,0.0002864965,0.00000107518,0.00003309105,0.00007895739,0.9953562,0.0004801193,0.0005867035,0.0002535742],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9366882,0.00047503,0.06164825,0.0005273175,0.00005978757,0.0001776912,0.0001294802,0.000138545,0.000155725],"genre_scores_gemma":[0.9963472,0.001006341,0.001573994,0.0000800023,0.00002962556,0.000009036315,0.00003926075,0.0000248732,0.0008896142],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06007426,"threshold_uncertainty_score":0.9982963,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005171767210632803,"score_gpt":0.2519779961709606,"score_spread":0.2468062289603278,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}