{"id":"W2539894455","doi":"10.1002/sia.6186","title":"Characterization of high‐aspect‐ratio periodic structures by X‐ray photoelectron spectroscopy","year":2016,"lang":"en","type":"article","venue":"Surface and Interface Analysis","topic":"Electron and X-Ray Spectroscopy Techniques","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba; Children's Hospital Research Institute of Manitoba","funders":"Canada Excellence Research Chairs, Government of Canada; Canada Foundation for Innovation; University of Manitoba","keywords":"X-ray photoelectron spectroscopy; Substrate (aquarium); Silicon; Characterization (materials science); Analytical Chemistry (journal); Base (topology); Materials science; Surface (topology); Rod; Planar; Spectroscopy; Chemistry; Nanotechnology; Optoelectronics; Physics; Geometry; Computer science; Nuclear magnetic resonance; Mathematics; Geology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001823878,0.0002668679,0.0001626156,0.0005180158,0.0002108867,0.0004064615,0.0003554198,0.0002547318,0.002215317],"category_scores_gemma":[0.0004075131,0.0002657991,0.0001049563,0.0003123936,0.0001849945,0.000294911,0.0001425624,0.0002905459,0.0005421395],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001089218,"about_ca_system_score_gemma":0.0001245158,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002372282,"about_ca_topic_score_gemma":0.0006593645,"domain_scores_codex":[0.9998701,0.000006601766,0.00000749309,0.00002577884,0.00007460949,0.00001544825],"domain_scores_gemma":[0.9998264,0.00003312312,0.00003694354,0.00003042338,0.00005790293,0.00001524125],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002212505,0.00001794818,0.0005497828,0.000100247,0.000004442888,0.0001268288,0.00004187596,0.0004046747,0.991561,0.000248342,0.000158668,0.00676407],"study_design_scores_gemma":[0.00001238936,0.0002362484,0.01406514,0.0000164937,0.00001794416,0.0005312134,0.0001037038,0.007486821,0.9711221,0.000374366,0.00602211,0.00001141583],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9499408,0.001591497,0.03803932,0.00006659629,0.00005542952,0.0001885252,0.00116538,0.0004953087,0.008457068],"genre_scores_gemma":[0.9296641,0.001450648,0.06060654,0.00005572706,0.00001665648,0.0002105108,0.00191368,0.0001170447,0.005965138],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002215317,"threshold_uncertainty_score":0.007411003,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005171767210632803,"score_gpt":0.2519779961709606,"score_spread":0.2468062289603278,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}