{"id":"W2544009533","doi":"10.1109/wct.2003.1321477","title":"Fabrication and analysis of new MEMS IF filters","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Band-pass filter; Resonator; Transceiver; Microelectromechanical systems; Electronic engineering; Cantilever; Distributed element filter; Wireless; Fabrication; Electronic circuit; Electrical engineering; Prototype filter; Computer science; Engineering; Materials science; Filter (signal processing); CMOS; Optoelectronics; Telecommunications; Low-pass filter","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000216368,0.0001986003,0.0002480794,0.0002183049,0.0002003653,0.0004091388,0.0002094261,0.0003710714,0.001525476],"category_scores_gemma":[0.0003277774,0.0001620364,0.0002582053,0.0001083678,0.0002264991,0.0003459466,0.00008884111,0.0001825754,0.000423411],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005450163,"about_ca_system_score_gemma":0.0001718073,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006290789,"about_ca_topic_score_gemma":0.0005488296,"domain_scores_codex":[0.9998592,0.000005523349,0.00000519396,0.00002401617,0.00008116139,0.00002478448],"domain_scores_gemma":[0.9998746,0.0000335896,0.00003238257,0.00001455657,0.00003356245,0.00001127145],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006443384,0.00001951406,0.0003874874,0.00006870797,0.0000106271,0.0000949319,0.00006102236,0.002063207,0.9883114,0.002575269,0.0001981649,0.006145219],"study_design_scores_gemma":[0.00003190918,0.0002521025,0.003708478,0.00000947948,0.00002157893,0.0001640486,0.00003893494,0.01463495,0.9673739,0.0004649185,0.01328301,0.00001667882],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.880057,0.002775234,0.09648915,0.0003156878,0.0001815552,0.0001051671,0.0002393586,0.000329506,0.01950723],"genre_scores_gemma":[0.9304819,0.001242576,0.05355776,0.00009414132,0.00005262133,0.0001119812,0.0003050222,0.00006643831,0.01408766],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001525476,"threshold_uncertainty_score":0.005103171,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01049560757287297,"score_gpt":0.2265964918238829,"score_spread":0.2161008842510099,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}