{"id":"W2544454173","doi":"10.1109/iedm.2005.1609265","title":"High performance 65 nm SOI technology with enhanced transistor strain and advanced-low-K BEOL","year":2006,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":55,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Materials science; Silicon on insulator; CMOS; Interconnection; Transistor; Optoelectronics; Dielectric; Electrical engineering; Silicon; Computer science; Engineering; Voltage; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00002620377,0.0001433634,0.000173383,0.00006737494,0.00003611765,0.00002013372,0.00006873297,0.00008102253,0.0001323432],"category_scores_gemma":[9.808214e-7,0.0001134238,0.000009985893,0.0001059827,0.00005469226,0.0001572895,0.000006480836,0.0000638541,0.00001054611],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001742026,"about_ca_system_score_gemma":0.000007068954,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003094571,"about_ca_topic_score_gemma":0.00011721,"domain_scores_codex":[0.9994304,0.000002781476,0.0001425256,0.0001565873,0.0000643332,0.0002033279],"domain_scores_gemma":[0.999801,0.0000081277,0.00001740224,0.0001291872,0.000018629,0.00002568268],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001320092,0.000008751475,0.000140248,0.0001154348,0.00001065495,0.000001709577,0.00003368663,0.00322263,0.9884148,0.001064097,0.00004017268,0.006934603],"study_design_scores_gemma":[0.0006084612,0.00009349939,0.003916685,0.00004794091,0.00001037915,0.00001076465,0.0001023265,0.0006520135,0.992932,0.0002477882,0.001124212,0.0002539301],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.996188,0.0003765806,0.0008719585,0.00004799779,0.0001480159,0.0001101892,0.00001290166,0.0004874675,0.001756821],"genre_scores_gemma":[0.9946144,0.00005397127,0.00502965,0.00002543627,0.00005991626,0.0000252604,0.000008391154,0.00002535215,0.0001576118],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006680673,"threshold_uncertainty_score":0.4625288,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.001887823297728897,"score_gpt":0.152630299584219,"score_spread":0.1507424762864901,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}