{"id":"W2544980588","doi":"10.1109/iedm.1994.383446","title":"An integrated CMOS polysilicon coil-based micro-Pirani gauge with high heat transfer efficiency","year":2002,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; University of Waterloo","keywords":"Electromagnetic coil; Torr; Materials science; CMOS; Thermal conductivity; Electrical engineering; Fabrication; Heat transfer; Sensitivity (control systems); Optoelectronics; Analytical Chemistry (journal); Electronic engineering; Composite material; Physics; Engineering; Thermodynamics; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00002924535,0.0002408409,0.0002189302,0.0001192762,0.0000607179,0.00002617691,0.0001915109,0.0001310419,0.0004668108],"category_scores_gemma":[0.000003895739,0.0001734326,0.0000403537,0.0003715014,0.00008967141,0.0001442479,0.000004100775,0.0002172257,0.00004090462],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004766504,"about_ca_system_score_gemma":0.000006139465,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001365467,"about_ca_topic_score_gemma":0.0001546781,"domain_scores_codex":[0.9991309,0.000004562721,0.0001679232,0.0002421073,0.0001106332,0.000343863],"domain_scores_gemma":[0.9995156,0.00002142167,0.00000368421,0.0003570859,0.00003093942,0.000071247],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001475998,0.00009007221,0.00004104026,0.00002017884,0.00001352426,0.00001457343,0.00006015111,0.0126056,0.9800462,0.000304171,0.0001190274,0.006670711],"study_design_scores_gemma":[0.0008081952,0.0003423738,0.0001321225,0.00003003274,0.00001467035,0.000007545453,0.0001378199,0.01486041,0.9806865,0.00001722733,0.002637749,0.000325372],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9430208,0.0002623884,0.05307645,0.0001062944,0.00006257077,0.0001795323,0.00001773328,0.00224024,0.001033957],"genre_scores_gemma":[0.994287,0.00005696999,0.005278167,0.000107946,0.00001534592,0.00002183327,0.00001289934,0.00004741164,0.0001724265],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05126616,"threshold_uncertainty_score":0.7072377,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007331622944134812,"score_gpt":0.1874956854134196,"score_spread":0.1801640624692848,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}