{"id":"W2545338803","doi":"","title":"A novel IC compatible push-pull mach-zehnder interferometer optomechanical pressure sensor","year":2014,"lang":"en","type":"article","venue":"Cambridge University Engineering Department Publications Database","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Interferometry; Mach–Zehnder interferometer; Pressure sensor; Materials science; Optoelectronics; Waveguide; Optics; Sensitivity (control systems); Substrate (aquarium); Silicon; Physics; Electronic engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001138024,0.0002693952,0.0002408336,0.0004564271,0.000109018,0.00005936103,0.0004639835,0.0001132475,0.00002890934],"category_scores_gemma":[0.00010118,0.0003118964,0.00008038835,0.0005608307,0.00004465725,0.0006137021,0.0002373011,0.0003078969,0.00006203511],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001548396,"about_ca_system_score_gemma":0.00001492928,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001188044,"about_ca_topic_score_gemma":0.00000392628,"domain_scores_codex":[0.9988461,0.000007967169,0.000195081,0.0003718531,0.0001662334,0.0004127943],"domain_scores_gemma":[0.9987578,0.00008597594,0.00004182843,0.0008417061,0.00008400215,0.000188713],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00004220427,0.000608398,0.0002393597,0.000541664,0.0007640672,0.00002573776,0.00006439802,0.08186117,0.7117208,0.1087736,0.09337655,0.001981997],"study_design_scores_gemma":[0.0009596203,0.00005936276,0.001065125,0.00005471344,0.0001185746,0.00003743444,0.00005839282,0.1729987,0.02973694,0.000003332462,0.7942799,0.0006278461],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1261253,0.0001374036,0.8676767,0.0002531729,0.0003282882,0.0003895145,0.001088447,0.002755635,0.001245458],"genre_scores_gemma":[0.9279687,0.0001340769,0.06800285,0.00005009802,0.00009289655,0.0000299176,0.001379137,0.00007830161,0.002263991],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.8018434,"threshold_uncertainty_score":0.9999333,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01195252571841712,"score_gpt":0.1987702255928132,"score_spread":0.1868176998743961,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}