{"id":"W2545547325","doi":"10.1109/icisip.2005.1619439","title":"Analysis, Simulation and Testing of a Micromirror with Rotational Serpentine Springs","year":2005,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Surface micromachining; Fabrication; Stiffness; Wafer; Voltage; Materials science; Microelectromechanical systems; Rotational speed; Finite element method; Silicon on insulator; Optics; Torsion spring; Spring (device); Structural engineering; Acoustics; Mechanical engineering; Engineering; Optoelectronics; Physics; Silicon; Electrical engineering; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002451794,0.0003536543,0.0003517311,0.0001733973,0.0002564014,0.0003301291,0.0005700375,0.0007444282,0.001788385],"category_scores_gemma":[0.000600812,0.0002348121,0.0004207294,0.00009856185,0.0003038594,0.0003388644,0.0002379926,0.0002484799,0.0002557656],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003609061,"about_ca_system_score_gemma":0.0006189251,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003460587,"about_ca_topic_score_gemma":0.002661908,"domain_scores_codex":[0.9998368,0.00002495211,0.000007960571,0.00002509841,0.00007706865,0.00002801039],"domain_scores_gemma":[0.9997984,0.000089195,0.00003232164,0.00003282283,0.00003453912,0.00001279342],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00009038268,0.00003068656,0.0009160559,0.00007405614,0.00001375867,0.0002707074,0.0001070606,0.9447541,0.04664512,0.001741433,0.0001366742,0.005219935],"study_design_scores_gemma":[0.00001069937,0.00005667793,0.0002539312,0.000002479165,0.000003614846,0.00003167949,0.00001352123,0.9926147,0.006415384,0.0001054273,0.000487385,0.000004366238],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.76153,0.0002163642,0.2235092,0.0001906462,0.00004739223,0.0001238541,0.0002589899,0.000822319,0.0133012],"genre_scores_gemma":[0.9647954,0.0000931195,0.03221984,0.00001612048,0.000004023132,0.00007914904,0.00006977328,0.00003980683,0.002682745],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003460587,"threshold_uncertainty_score":0.006880879,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0122067506459342,"score_gpt":0.2369976986554175,"score_spread":0.2247909480094833,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}