{"id":"W2545648380","doi":"10.1016/j.elstat.2009.12.002","title":"Analysis of charged device model (CDM) ESD in MEMS","year":2010,"lang":"en","type":"article","venue":"Journal of Electrostatics","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":false,"ca_institutions":"Western University","funders":"","keywords":"Stiction; Microelectromechanical systems; Electrostatic discharge; Capacitive sensing; Materials science; Dielectric; Voltage; Charge (physics); Square (algebra); Optoelectronics; Electrical engineering; Physics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001772684,0.00008655315,0.0003332848,0.0005040442,0.00001094006,0.0000064072,0.0001504515,0.00007822376,0.000009142037],"category_scores_gemma":[0.0001017388,0.00007542874,0.00009325948,0.0006157004,0.0000288014,0.0001126048,0.000009455956,0.0005084194,4.844473e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003255142,"about_ca_system_score_gemma":0.00002910442,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002140843,"about_ca_topic_score_gemma":0.000150466,"domain_scores_codex":[0.9992111,0.000002121672,0.0004209046,0.00004651511,0.0001422044,0.0001771632],"domain_scores_gemma":[0.9995119,0.00005924863,0.0001631546,0.0001280875,0.0001040632,0.00003356046],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008819119,0.00002577304,0.0005921898,0.00001388473,0.0001848672,0.000005673918,0.000174629,0.1257928,0.8706997,0.0003593207,0.00007260606,0.002069756],"study_design_scores_gemma":[0.0005180169,0.0001512188,0.002349859,0.00002352683,0.0003612025,0.00001414091,0.0001478977,0.4526863,0.5374615,0.00550053,0.000586188,0.0001995547],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9739082,0.0002235858,0.02551434,0.00005314038,0.00007464883,0.00003034974,0.000005035884,0.00002419881,0.0001665225],"genre_scores_gemma":[0.9748979,0.0004831934,0.02455432,0.00001868419,0.00001522455,8.597856e-7,0.000001058429,0.00001318554,0.00001561317],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3332382,"threshold_uncertainty_score":0.3075895,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009283098642493784,"score_gpt":0.2566938808220414,"score_spread":0.2474107821795476,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}