{"id":"W2548005565","doi":"10.1109/icece.2012.6471490","title":"Sidewall roughness control in deep reactive ion etch process for micromachined Si devices","year":2012,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Deep reactive-ion etching; Passivation; Materials science; Etching (microfabrication); Reactive-ion etching; Optoelectronics; Silicon; Surface finish; Surface roughness; Surface micromachining; Nanotechnology; Electronic engineering; Layer (electronics); Fabrication; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009851563,0.0001412913,0.0001899663,0.00007444052,0.00002742348,0.000009527057,0.0001129522,0.0001193225,0.000007553393],"category_scores_gemma":[0.00005706164,0.0001178641,0.00003161672,0.0001218983,0.00001657456,0.0003999491,0.00001263105,0.0001237376,0.000006061184],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005893935,"about_ca_system_score_gemma":0.000005276096,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003029949,"about_ca_topic_score_gemma":0.0004310583,"domain_scores_codex":[0.9992928,0.00000265745,0.0001567318,0.0001201653,0.00005438413,0.0003732747],"domain_scores_gemma":[0.9996769,0.0001067631,0.00002827739,0.0001189101,0.00003129724,0.00003786283],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001182497,0.0001506887,0.008984484,0.0003533212,0.00007444259,0.00000298868,0.001512292,0.004555085,0.9480453,0.0014314,0.0001029321,0.03466888],"study_design_scores_gemma":[0.002758826,0.00009238956,0.01461838,0.00007749617,0.00003400708,0.000009985672,0.002697455,0.02663218,0.9411542,0.00425327,0.006972688,0.0006990922],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.968559,0.0007400994,0.02806134,0.00008159584,0.0001587166,0.000437293,0.00000493123,0.0005975154,0.001359535],"genre_scores_gemma":[0.9970627,0.00002020661,0.002510314,0.00006191745,0.00005961328,0.0002092957,0.000004772347,0.00002796584,0.00004324803],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03396979,"threshold_uncertainty_score":0.4806357,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01087907286985272,"score_gpt":0.2639514031593319,"score_spread":0.2530723302894792,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}