{"id":"W2550687280","doi":"10.1021/acs.chemmater.6b03077","title":"Nanomanufacturing: High-Throughput, Cost-Effective Deposition of Atomic Scale Thin Films via Atmospheric Pressure Spatial Atomic Layer Deposition","year":2016,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":65,"is_retracted":false,"has_abstract":true,"ca_institutions":"Angstrom Engineering (Canada); University of Waterloo","funders":"University of Waterloo; University of Cambridge","keywords":"Nanomanufacturing; Throughput; Materials science; Nanotechnology; Deposition (geology); Atomic layer deposition; Coating; Layer (electronics); Thin film; Sputtering; Nanometre; Scalability; Process engineering; Computer science; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004494302,0.0004471432,0.0002825505,0.0004568151,0.0003041191,0.0006574162,0.0008172636,0.0004543794,0.00189317],"category_scores_gemma":[0.0004359334,0.0003588023,0.000290792,0.0004367132,0.0003446013,0.0006681475,0.0008359441,0.0006963292,0.0009955112],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006146998,"about_ca_system_score_gemma":0.0003651207,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008287336,"about_ca_topic_score_gemma":0.001551823,"domain_scores_codex":[0.9994941,0.00004311283,0.00002824924,0.0000746741,0.0003146915,0.00004517178],"domain_scores_gemma":[0.9998325,0.00004290778,0.00004497898,0.0000343937,0.00003141782,0.00001375279],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002850165,0.00002959289,0.0002550844,0.0005088752,0.00002251555,0.0001535205,0.00006053812,0.0007280554,0.9600221,0.003128286,0.001593981,0.03346886],"study_design_scores_gemma":[0.00001936387,0.0001569939,0.0009723602,0.00002832486,0.00001789069,0.0005984468,0.00003118791,0.01060035,0.9454553,0.0008197663,0.04127384,0.00002602398],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3836498,0.06580706,0.4805312,0.002447822,0.001294226,0.0006982932,0.001596385,0.006886968,0.05708824],"genre_scores_gemma":[0.6948153,0.02287001,0.2701279,0.0004912449,0.000187135,0.0001922708,0.0008212529,0.000220833,0.01027409],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00189317,"threshold_uncertainty_score":0.006333232,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005578381950665174,"score_gpt":0.2013798708182225,"score_spread":0.1958014888675573,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}