{"id":"W2560176703","doi":"10.1017/s143192761500882x","title":"High-accuracy electron tomography of semiconductor devices","year":2015,"lang":"en","type":"article","venue":"Microscopy and Microanalysis","topic":"Advanced Electron Microscopy Techniques and Applications","field":"Biochemistry, Genetics and Molecular Biology","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; University of Alberta; National Institute for Nanotechnology","funders":"","keywords":"Library science; Political science; History; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003350341,0.0003794381,0.0003228887,0.0004936438,0.0002399304,0.0006685035,0.0004899204,0.0005831059,0.00142727],"category_scores_gemma":[0.0007639935,0.000319736,0.0001721778,0.000423582,0.0003819906,0.001021819,0.0006390507,0.0008258164,0.0004511339],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004638713,"about_ca_system_score_gemma":0.0003398973,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007903339,"about_ca_topic_score_gemma":0.001557231,"domain_scores_codex":[0.9997423,0.00003587424,0.00001094102,0.0000430115,0.0001414206,0.00002629258],"domain_scores_gemma":[0.9996313,0.000125309,0.00003829382,0.00009068915,0.00009145126,0.00002304842],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001841543,0.00003113554,0.00254692,0.0003902269,0.00005317129,0.0005042284,0.0001637001,0.02216385,0.8587795,0.04188948,0.0048071,0.0684865],"study_design_scores_gemma":[0.00003417189,0.00008899596,0.009829756,0.00007347291,0.00004978343,0.001740745,0.0001726631,0.3405873,0.5948147,0.01207324,0.04045549,0.00007977614],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1591837,0.008599076,0.8091857,0.001443936,0.0002836141,0.0000471596,0.0005972986,0.001650957,0.01900856],"genre_scores_gemma":[0.7292899,0.00321412,0.2593676,0.0001069026,0.00005294273,0.00002916287,0.0003134425,0.0001534818,0.007472338],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00142727,"threshold_uncertainty_score":0.00477469,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008472733294854507,"score_gpt":0.3081005193838727,"score_spread":0.2996277860890182,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}