{"id":"W2564211426","doi":"10.1116/1.4971990","title":"Activation of the dimers and tetramers of metal amidinate atomic layer deposition precursors upon adsorption on silicon oxide surfaces","year":2016,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"U.S. Department of Energy","keywords":"Chemistry; Copper; Adsorption; X-ray photoelectron spectroscopy; Oxide; Silicon; Binding energy; Density functional theory; Monomer; Silicon oxide; Physical chemistry; Desorption; Inorganic chemistry; Crystallography; Computational chemistry; Organic chemistry; Chemical engineering; Polymer","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005739871,0.000221911,0.0001678378,0.0001273924,0.0001158228,0.0002105204,0.0003321321,0.00019342,0.00114467],"category_scores_gemma":[0.0001762129,0.0001679009,0.0001122379,0.0001218869,0.0001320174,0.0001388882,0.0001866962,0.0002625498,0.0002008015],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003289682,"about_ca_system_score_gemma":0.0001263301,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007498729,"about_ca_topic_score_gemma":0.001233772,"domain_scores_codex":[0.9999213,0.000007801989,0.00000367003,0.00001808493,0.00002799686,0.00002113431],"domain_scores_gemma":[0.9999472,0.00001445093,0.00001212495,0.000006273339,0.00001141516,0.000008496647],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008083695,0.00001544882,0.0002501086,0.0000704702,0.00000473447,0.00003968276,0.00003934197,0.0004799678,0.9971377,0.0001386584,0.00005843238,0.001684606],"study_design_scores_gemma":[0.00000997239,0.0001539277,0.001274625,0.000003458687,0.000003363492,0.00002858747,0.00002980137,0.004630373,0.993242,0.00002666145,0.0005936624,0.000003660288],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9982338,0.000166818,0.0004679446,0.00001652757,0.000004913332,0.000005787388,0.00004269284,0.00002275666,0.001038766],"genre_scores_gemma":[0.998315,0.0001494872,0.0008885472,0.00001008761,0.000001890278,0.000008605219,0.00008929995,0.000007964934,0.0005291455],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00114467,"threshold_uncertainty_score":0.0038293,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009626552453535556,"score_gpt":0.2223750404486262,"score_spread":0.2127484879950906,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}