{"id":"W2573027055","doi":"10.1002/crat.201600240","title":"Sputtering and amorphization of crystalline semiconductors by Nanodroplet Bombardment","year":2017,"lang":"en","type":"article","venue":"Crystal Research and Technology","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Government of Jiangsu Province; Ministry of Finance; Ministry of Education of the People's Republic of China; National Natural Science Foundation of China","keywords":"Sputtering; Amorphous solid; Materials science; Etching (microfabrication); Evaporation; Chemical physics; Kinetic energy; Quenching (fluorescence); Nanotechnology; Chemistry; Thin film; Layer (electronics); Crystallography; Optics; Fluorescence","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000153283,0.0000751095,0.0001389402,0.0002771713,0.0002192258,0.00007048489,0.000137781,0.00009577216,0.00003612199],"category_scores_gemma":[0.00009773094,0.00007127409,0.00001338257,0.0001344649,0.0003328841,0.0001368521,0.0001551947,0.0002023809,0.000001628507],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002581094,"about_ca_system_score_gemma":0.00000780551,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007149435,"about_ca_topic_score_gemma":0.0000321028,"domain_scores_codex":[0.9993815,0.000008583215,0.000135138,0.0001439773,0.0001192673,0.0002114818],"domain_scores_gemma":[0.9995391,0.00002491549,0.0000318625,0.000251561,0.0001029413,0.00004960098],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004216556,0.00001777166,0.003467079,0.00005876019,0.00003938342,0.000005090019,0.00002741967,0.00003923925,0.990025,0.0004636984,0.001006273,0.004846023],"study_design_scores_gemma":[0.001289447,0.0007085448,0.002472192,0.0003033893,0.00003959618,0.00008465235,0.001863723,0.03794377,0.8871768,0.009994217,0.05755319,0.0005705352],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9974888,0.0006483331,0.000707242,0.0005005014,0.00003145916,0.00006995068,0.00002204034,0.00005735672,0.0004743111],"genre_scores_gemma":[0.9985208,0.0009870919,0.0001756097,0.000001322393,0.00001324254,0.000008537597,0.00000819062,0.00001214884,0.0002730399],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1028483,"threshold_uncertainty_score":0.2906473,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02254250516368201,"score_gpt":0.3026902188901645,"score_spread":0.2801477137264825,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}