{"id":"W2579479237","doi":"10.1109/icsens.2016.7808650","title":"Design, fabrication and characterization of a high performance MEMS accelerometer","year":2016,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Accelerometer; Deep reactive-ion etching; Microelectromechanical systems; Materials science; Capacitive sensing; Gyroscope; Fabrication; Sensitivity (control systems); Bandwidth (computing); Electronic engineering; Silicon on insulator; Wafer; Optoelectronics; Computer science; Electrical engineering; Etching (microfabrication); Reactive-ion etching; Engineering; Nanotechnology; Silicon; Aerospace engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000214613,0.00004310974,0.00005771664,0.00004417985,0.000008871137,0.000002628421,0.00003409248,0.0000319275,0.0000204218],"category_scores_gemma":[0.000006184724,0.00002702942,0.000004052343,0.00005797818,0.00001840687,0.0001934039,0.00001111376,0.00001451351,0.000003930256],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000008281306,"about_ca_system_score_gemma":0.000001077467,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":7.21347e-7,"about_ca_topic_score_gemma":1.212003e-7,"domain_scores_codex":[0.9997855,6.942793e-7,0.00007296945,0.00005263861,0.00002947823,0.00005866566],"domain_scores_gemma":[0.9998651,0.00001337727,0.00001630382,0.00007898553,0.00001789193,0.000008327142],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000001517111,0.000001446635,0.00006826439,0.000008902796,0.000002472409,2.321735e-8,0.000007636368,0.000008346756,0.8331028,0.00004925096,0.000005634216,0.1667437],"study_design_scores_gemma":[0.00008943197,0.00002547923,0.04749155,0.00001421809,0.000001556846,5.600771e-7,0.000002036424,0.0003092603,0.9516755,0.0001583679,0.0001864781,0.00004558627],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7472614,0.000009198278,0.2524173,0.00002644002,0.00002905946,0.00004664944,8.148569e-7,0.0001564415,0.00005270232],"genre_scores_gemma":[0.9939085,0.0008181214,0.005104782,0.000003846157,0.000007970734,0.00001194215,9.34622e-7,0.000006827411,0.0001370508],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2473125,"threshold_uncertainty_score":0.1102228,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01541880244965394,"score_gpt":0.1967406662851417,"score_spread":0.1813218638354878,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}