{"id":"W2582171384","doi":"10.3390/mi8010029","title":"Glass Imprint Templates by Spark Assisted Chemical Engraving for Microfabrication by Hot Embossing","year":2017,"lang":"en","type":"article","venue":"Micromachines","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université Laval; Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microfabrication; Embossing; Template; Fabrication; Materials science; Rapid prototyping; Polycarbonate; Microelectromechanical systems; Engraving; SPARK (programming language); Nanotechnology; Computer science; Engineering drawing; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003019658,0.000448084,0.0002681807,0.0003124746,0.0001854931,0.0003478938,0.0003700481,0.0003049111,0.001221438],"category_scores_gemma":[0.000329434,0.0003191811,0.0004403415,0.0002269488,0.0004856335,0.0003295653,0.0003796534,0.0006989714,0.0008991092],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002655142,"about_ca_system_score_gemma":0.0003304746,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003363906,"about_ca_topic_score_gemma":0.0009610371,"domain_scores_codex":[0.9996095,0.00002429148,0.00002502739,0.00006682926,0.0002308242,0.00004354527],"domain_scores_gemma":[0.999759,0.00007318634,0.00006115927,0.00006441768,0.00002407597,0.00001820238],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001535534,0.00001317504,0.00005456327,0.00004953617,0.000004924975,0.00009395044,0.00004080727,0.0003695808,0.9903425,0.0005961779,0.0001385831,0.008280841],"study_design_scores_gemma":[0.000003553139,0.00003788761,0.0001625424,0.000001670395,0.000003032528,0.0001178897,0.000005772564,0.00152402,0.9957736,0.00008359087,0.002280657,0.000005616044],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5614046,0.00411285,0.4141431,0.0004777068,0.0004943942,0.0004560425,0.0004673602,0.002922904,0.01552101],"genre_scores_gemma":[0.8218182,0.002025312,0.1688605,0.0001278565,0.00006877504,0.0001671846,0.0002872322,0.0002246889,0.006420212],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001221438,"threshold_uncertainty_score":0.004086137,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01005279572293301,"score_gpt":0.2579630754568582,"score_spread":0.2479102797339252,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}