{"id":"W2583174609","doi":"10.1007/s00542-016-3250-3","title":"Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process","year":2017,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":false,"ca_institutions":"McGill University","funders":"University of Dayton","keywords":"Gyroscope; Microfabrication; Materials science; Microelectromechanical systems; Vibrating structure gyroscope; Resonator; Wafer; Capacitance; Optoelectronics; Linearity; Fabrication; Electronic engineering; Engineering; Physics; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002484136,0.0004667616,0.0007277654,0.0002717048,0.0003588957,0.0002087304,0.001449529,0.0006529955,0.000006175101],"category_scores_gemma":[0.000253682,0.0003672955,0.00005587352,0.0003068128,0.0003832963,0.0005012575,0.0003018631,0.000718717,0.00002466587],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001996134,"about_ca_system_score_gemma":0.00003765815,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002857152,"about_ca_topic_score_gemma":0.001920489,"domain_scores_codex":[0.9980662,0.00001101623,0.0005432249,0.0005084059,0.0001944682,0.0006766413],"domain_scores_gemma":[0.9980665,0.00006993811,0.0002478048,0.001489815,0.00009310844,0.00003283203],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006664436,0.00005727656,0.009521375,0.0006907524,0.00007397938,0.00007109594,0.0002372025,0.0002442013,0.9774686,0.0007648451,0.00009928369,0.01070478],"study_design_scores_gemma":[0.001106955,0.00008934213,0.07003884,0.0004663512,0.000009544488,0.00001283728,0.001582788,0.00003757368,0.9236536,0.001926,0.000453993,0.0006221599],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.991237,0.000487627,0.0006919493,0.0003728539,0.0002880827,0.0006393053,0.0001610552,0.005939434,0.0001827027],"genre_scores_gemma":[0.9977626,0.0002241965,0.001621833,0.000007085098,0.000016236,0.0001944782,0.000009247836,0.00006908752,0.00009523021],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06051747,"threshold_uncertainty_score":0.9998779,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03841514739553502,"score_gpt":0.2936111139438676,"score_spread":0.2551959665483326,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}