{"id":"W2583174609","doi":"10.1007/s00542-016-3250-3","title":"Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process","year":2017,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":false,"ca_institutions":"McGill University","funders":"University of Dayton","keywords":"Gyroscope; Microfabrication; Materials science; Microelectromechanical systems; Vibrating structure gyroscope; Resonator; Wafer; Capacitance; Optoelectronics; Linearity; Fabrication; Electronic engineering; Engineering; Physics; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005978306,0.0004748104,0.0006394199,0.0003121048,0.0003860121,0.0003612843,0.0009712522,0.0006835151,0.001555969],"category_scores_gemma":[0.0009594735,0.0003044434,0.0002626943,0.00027109,0.0003184334,0.0006789811,0.0003678252,0.0004100038,0.0005405677],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005387802,"about_ca_system_score_gemma":0.0006561186,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001368353,"about_ca_topic_score_gemma":0.002721322,"domain_scores_codex":[0.999324,0.00006202044,0.00003209028,0.0002093405,0.0003101578,0.00006239418],"domain_scores_gemma":[0.9994716,0.00009858358,0.0001081165,0.0001152102,0.0001754301,0.00003122865],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002148388,0.00004174548,0.001199694,0.00009138927,0.00002438627,0.0001363573,0.00007420293,0.0002472089,0.9900838,0.0004977952,0.000834658,0.006553899],"study_design_scores_gemma":[0.00005844538,0.0007012215,0.00583709,0.000009445928,0.00004571311,0.0003042367,0.00004932613,0.006173457,0.9810778,0.00006275855,0.005651088,0.00002932141],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9401319,0.001113411,0.04867576,0.000495739,0.000285754,0.0001762897,0.0006811896,0.003258645,0.005181365],"genre_scores_gemma":[0.9638094,0.0001822725,0.0317579,0.00009781536,0.00005724786,0.00007601533,0.0002853666,0.0001877449,0.003546207],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001555969,"threshold_uncertainty_score":0.005205274,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03841514739553502,"score_gpt":0.2936111139438676,"score_spread":0.2551959665483326,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}