{"id":"W2583728972","doi":"10.1016/j.mee.2017.02.005","title":"Fabrication of top-down gold nanostructures using a damascene process","year":2017,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":false,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Copper interconnect; Materials science; Chemical-mechanical planarization; Scanning electron microscope; Nanotechnology; Nanostructure; Polishing; Fabrication; Microstructure; Profilometer; Silicon; Optoelectronics; Composite material; Surface finish; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007456712,0.0002142229,0.0002428486,0.0001135154,0.00007539247,0.00006259735,0.0005006848,0.0001021586,0.00000683396],"category_scores_gemma":[0.0001162641,0.0002429029,0.00005746845,0.0000968546,0.00003254364,0.0003560375,0.00005250907,0.0002642794,0.000001234826],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002137858,"about_ca_system_score_gemma":0.00003268871,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003726751,"about_ca_topic_score_gemma":0.000006370859,"domain_scores_codex":[0.9990112,0.000004808397,0.0002385191,0.0001857289,0.0001203909,0.0004394111],"domain_scores_gemma":[0.999195,0.00001684731,0.00009371211,0.0005785545,0.00006654138,0.00004929377],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002589885,0.000004234482,0.0002438485,0.0001628093,0.00002822543,0.000001347755,0.0001075375,0.1528587,0.8443401,0.0002361997,0.00003642961,0.001978039],"study_design_scores_gemma":[0.00013695,0.0000153524,0.0007251058,0.00009634414,0.00001612748,0.00001662627,0.000006638297,0.1021502,0.8957155,0.0003116947,0.0005699579,0.0002394777],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8834527,0.001574581,0.1136713,0.00001857083,0.0001892087,0.0001824636,0.000008843222,0.0006615736,0.0002407983],"genre_scores_gemma":[0.9803716,0.00009097743,0.01935014,0.000003258112,0.00007516309,0.00001290659,0.000004612713,0.00007345713,0.00001789754],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.09691893,"threshold_uncertainty_score":0.9905294,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007378788302800016,"score_gpt":0.2521403864369096,"score_spread":0.2447615981341096,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}