{"id":"W2588241828","doi":"10.1109/antem.2000.7851661","title":"Fabrication of a microwave MEMS switch","year":2000,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"COM DEV International; National Research Council Canada","funders":"Canadian Space Agency","keywords":"Insertion loss; Microelectromechanical systems; Fabrication; Cantilever; Microwave; Materials science; Optoelectronics; Crossover switch; Coplanar waveguide; Waveguide; Electrical engineering; Optical switch; Engineering; Telecommunications","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000110693,0.00003726711,0.00005326093,0.00002217953,0.000006043614,0.00000158979,0.00004747645,0.00003223351,0.0002257418],"category_scores_gemma":[0.000003641501,0.00003237963,0.00001412866,0.00007891946,0.00001224226,0.00003901589,0.000003731518,0.00003223397,0.00003862322],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000007802428,"about_ca_system_score_gemma":0.000001207322,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006970368,"about_ca_topic_score_gemma":0.000004966349,"domain_scores_codex":[0.9997977,2.314514e-7,0.00006984288,0.00004209427,0.00002700134,0.00006311617],"domain_scores_gemma":[0.9998646,0.000006017598,0.000005320215,0.0001065527,0.000009565858,0.000007895263],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[8.385564e-7,0.000004169792,0.00001071168,0.000007167963,0.000004056019,1.95502e-7,0.00002295528,0.0005146415,0.7459629,0.0002815552,0.0008297951,0.2523611],"study_design_scores_gemma":[0.000060609,0.000009499211,0.0005052277,0.000004563532,0.000001687217,0.000001154332,0.00003269106,0.0004319247,0.9769944,0.001886435,0.02001948,0.00005235325],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9140359,0.0002220482,0.01181734,0.00003154338,0.00003238702,0.00004956632,8.332319e-7,0.00052582,0.07328457],"genre_scores_gemma":[0.9907455,0.0003032432,0.007728386,0.000007189072,0.000009075985,0.00000447084,8.55241e-7,0.00000644813,0.001194786],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2523087,"threshold_uncertainty_score":0.2471714,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007325686469698427,"score_gpt":0.205736664557253,"score_spread":0.1984109780875545,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}