{"id":"W2588241828","doi":"10.1109/antem.2000.7851661","title":"Fabrication of a microwave MEMS switch","year":2000,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"COM DEV International; National Research Council Canada","funders":"Canadian Space Agency","keywords":"Insertion loss; Microelectromechanical systems; Fabrication; Cantilever; Microwave; Materials science; Optoelectronics; Crossover switch; Coplanar waveguide; Waveguide; Electrical engineering; Optical switch; Engineering; Telecommunications","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002702235,0.0002432785,0.0002596135,0.0002286762,0.0007088741,0.0003476818,0.0003930446,0.0004370306,0.00379407],"category_scores_gemma":[0.0001781152,0.000270349,0.0002958448,0.0001621701,0.0002182937,0.0002973815,0.0003730968,0.0006090547,0.001437412],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001847585,"about_ca_system_score_gemma":0.0003706494,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003511983,"about_ca_topic_score_gemma":0.000347043,"domain_scores_codex":[0.9998247,0.00001063605,0.000009585074,0.00003165119,0.00009656755,0.00002692976],"domain_scores_gemma":[0.9999179,0.00001656262,0.000008554392,0.0000155576,0.00002108071,0.00002037047],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002521237,0.00003286745,0.0001365367,0.00005336421,0.000008310257,0.0001147246,0.00003645316,0.000346355,0.9890106,0.001533094,0.000827958,0.007874528],"study_design_scores_gemma":[0.00003528794,0.0003054527,0.001516856,0.00001024942,0.00001511057,0.000322254,0.00003100828,0.002469581,0.9515959,0.0005372479,0.04314471,0.00001629582],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6430957,0.002555168,0.2793714,0.002032404,0.00257908,0.001064443,0.001695166,0.003398739,0.06420789],"genre_scores_gemma":[0.6462815,0.001702201,0.3250321,0.0005431038,0.0003066419,0.0006400279,0.0009205816,0.0002295242,0.02434438],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00379407,"threshold_uncertainty_score":0.01269245,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007325686469698427,"score_gpt":0.205736664557253,"score_spread":0.1984109780875545,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}