{"id":"W2588316698","doi":"10.3390/mi8020053","title":"Micro-Hole Drilling on Glass Substrates—A Review","year":2017,"lang":"en","type":"article","venue":"Micromachines","topic":"Advanced Machining and Optimization Techniques","field":"Engineering","cited_by":124,"is_retracted":false,"has_abstract":true,"ca_institutions":"Laurentian University; Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Surface micromachining; Machining; Machinability; Microelectromechanical systems; Materials science; Mechanical engineering; Fabrication; Nanotechnology; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004256151,0.0009396359,0.0009610632,0.002364811,0.000321155,0.000873798,0.0008665588,0.0009001348,0.002441894],"category_scores_gemma":[0.0004385278,0.0004745783,0.0004745493,0.002447821,0.0004235836,0.00186557,0.0005369951,0.0008069205,0.001722146],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003193162,"about_ca_system_score_gemma":0.0006829532,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009011565,"about_ca_topic_score_gemma":0.001120031,"domain_scores_codex":[0.9997759,0.0000210233,0.00003068185,0.00005924006,0.00009298357,0.00002022547],"domain_scores_gemma":[0.9997568,0.0001122775,0.0000443424,0.000009962782,0.0000572972,0.00001933224],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00004551401,0.0001340477,0.0003115555,0.02012605,0.00006205889,0.0003313597,0.00009075711,0.001048938,0.01032253,0.003761579,0.01343688,0.9503286],"study_design_scores_gemma":[0.00001078478,0.0002655576,0.001354235,0.002793587,0.00009164123,0.002392493,0.0001096559,0.0006447972,0.006467492,0.001394427,0.98443,0.00004542718],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.0005245995,0.9969217,0.0009283136,0.00007607824,0.0001870965,0.00001357256,0.00002186972,0.0000159726,0.001310747],"genre_scores_gemma":[0.002054467,0.9953361,0.001472331,0.0001030923,0.0001773339,0.00001719297,0.00004508067,0.000004376534,0.0007899723],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.002441894,"threshold_uncertainty_score":0.008168936,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01243096426070655,"score_gpt":0.2731689943178088,"score_spread":0.2607380300571023,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}