{"id":"W2588837690","doi":"10.1109/jmems.2017.2661979","title":"Varifocal Scanner Using Wafer Bonding","year":2017,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"National Research Council Canada; Ministry of Education, Culture, Sports, Science and Technology","keywords":"Scanner; Wafer; Materials science; Optics; Wafer bonding; Optoelectronics; Physics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001946445,0.0004248474,0.0003580116,0.0004270542,0.0003161546,0.0003647436,0.0009880696,0.001049729,0.007615817],"category_scores_gemma":[0.0003041272,0.0005633434,0.0002923339,0.0003197403,0.0002388977,0.0008018899,0.0008111193,0.0006123596,0.001995845],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003269727,"about_ca_system_score_gemma":0.0003755943,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005082405,"about_ca_topic_score_gemma":0.0006407248,"domain_scores_codex":[0.9997382,0.00001824364,0.00001206172,0.00008388744,0.0001191863,0.0000284658],"domain_scores_gemma":[0.9998281,0.00002981934,0.00003294379,0.00004412586,0.00005074924,0.00001424656],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008383408,0.0000529362,0.0009854578,0.0002541097,0.00003445324,0.0003740779,0.00008394912,0.0008170593,0.9461601,0.003521334,0.004952462,0.04268031],"study_design_scores_gemma":[0.00006244474,0.0006951882,0.005195105,0.00003832403,0.00004662844,0.003289651,0.00009710132,0.02203622,0.8960474,0.0008193077,0.0715528,0.0001197862],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5468622,0.007312881,0.3586963,0.001776224,0.001115878,0.000638658,0.00204106,0.00935491,0.07220181],"genre_scores_gemma":[0.623795,0.001058398,0.3569637,0.0003437714,0.000137825,0.0003694169,0.0007116094,0.0002371761,0.01638317],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007615817,"threshold_uncertainty_score":0.02547741,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01901659412290921,"score_gpt":0.2486046918127381,"score_spread":0.2295880976898289,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}